244E Pressure/Flow Controller
The MKS Instruments 244E Pressure/Flow Controller is designed to interface with a wide variety of input signals and with external control signals for full system automation. Set point, phase lead and gain, manual/automatic/external control mode, and input signal adjustments are provided. The 244 accepts input signals from thermocouple and ionization gauges, Pirani gauges, and MKS Baratron® capacitance manometers with Full Scales between 0.1 and 10 VDC. A 245 Control Valve is needed for the System.
The 244/245 Pressure/Flow Control System is a closed-loop feedback control system for use in vacuum processes requiring an all-metal, bakeable control valve, for wide range pressure or flow control. The 244/245 system, comprised of a control module and servo-controlled leak valve, is ideally suited for single-gas process such as sputtering, sputter-etching, ion source control, ion implantation, vacuum gauge calibration, etc.