154B High Flow Control Valve

photo - 154 High Flow Control Valve

The MKS Instruments 154 High Flow Control Valve offers better response time as compared to other high flow control valves. This is possible through the use of a "balanced forces" design that automatically neutralizes the pressure-induced imbalances within the valve. The elastomer-sealed 154 valve is designed for flow rates from 0.2 to 200 slm.

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VCR® is a registered trademark of Swagelok® Company.


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Part NumberFull Scale RangeFitting Compatible withSealsCAD DiagramsPriceQTY
0154B-200LSV200 slm of NitrogenSwagelok® 1/2" tubeViton125950A.dwg
Quote Only
0154B-200LRV200 slm of NitrogenSwagelok® 8 VCR® maleViton125954A.dwg
Quote Only

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.