AX8555 Stand-Alone Low Flow Ozone Delivery System

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Overview

The AX8555 Ozone Delivery Subsystem supports multiple chambers or tools to provide ultra clean ozone gas. The AX8555 is a fully integrated, lower flow ozone gas delivery system specifically designed for advanced semiconductor process applications such as Atomic Layer Deposition (ALD). ALD is a self-limiting "pulsed" process that sequentially introduces reactants into the process chamber in the gas phase to build successive monolayers of film on the wafer. By appropriately selecting the precursor materials, parameters such as growth rate, reaction temperature, impurity levels, and crystallinity of the deposited films can be influenced. Films grown using ozone as an oxidizer in ALD are very high quality, stoichiometric, uniform, dense and free from any significant contamination.

Specifically designed for lower flow for advanced applications such as ALD
Closed-loop concentration for tighter process control
Configurable with up to four (4) independent channels to support multiple ALD tools or chambers concurrently
Ultra clean ozone

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		AX8555 Ozone Delivery Subsystem, 0.5 - 5 slm, 4-channel, Standalone Contact Us	AX8555 Ozone Delivery Subsystem, 0.5 - 5 slm, 4-channel, Standalone	UNIVERSAL	0.0	1.0	0.0		0.0	Contact Us

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Specifications

Type

Ozone Gas Delivery System
Ozone Output

26 - 180 g/hr per channel
Flow Rate

0.5 - 5 slm per channel
Feed Gas

Oxygen, Nitrogen (20 - 100 ppm of total flow), Carbon Dioxide (1000 - 2000 ppm of total flow)
Feed Gas Supply Pressure

60 psig (4.2 kg/cm²) nominal, 75 psig (5.3 kg/cm²) maximum, N2/CO2 pressure 10 psi higher than O2 pressure
Feed Gas Purity

99.9995% minimum
Operating Temperature

41 - 104°F (5 - 40°C)
Cooling Water Temperature Required

63 - 73°F (17 - 23°C)
Cooling Water Filtration Required

20µm
Cooling Water Quality Required

Demineralized
Cooling Water Minimum Flow Required

1.0 gpm (2.3 - 3.8 slm) minimum to 1.6 gpm max. per channel (depending on configuration)
Cooling Water Connections Required

1/2 in. compression (Swagelok®)
Cooling Water Flow Control/Indication Required

Variable - area flow meter with valve
Cooling Water Pressure Indication Required

Inlet pressure gauge
Voltage Requirements

208 volts AC (±10%), three phase

Current Requirements

15 Amps RMS, 30 Amps service, 31 Amps RMS, 50 amps service (depending on configuration) minimum of 10,000 A.I.C.
Frequency

50/60 Hz
Pressure Indication

Inlet pressure gauge for each gas
Exhaust Flow Rate

150 cfm (70.8 l/s)
Exhaust Type

SEMI Category 4 (accidental or emergency release of hazardous gas or vapor)
Exhaust Static Pressure

0.10 in. (2.54 mm) H2O minimum measured at the bottom of the duct flange adapter on cabinet
Control Air Pressure

70 - 100 psig
Control Air Type

CDA or dry nitrogen, 40µm filtered
Control Air Fitting

1/4 in. compression (Swagelok®)
Exhaust Connection

6 - in. diameter duct opening
Dimensions

24 x 75 x 36 in. (610 x 1575 x 914 mm) (width x height x depth)
Relative Humidity

30 - 90% (non - condensing)
Weight

600 lbs.(272 kg) for system with one generator,880 lbs.(400 kg) for system with four generators
Compliance

CE, S2 - 0302, F47
Altitude

Up to 3280 ft. (1000 m) above mean sea level

Specifications

Type

Ozone Gas Delivery System
Ozone Output

26 - 180 g/hr per channel
Flow Rate

0.5 - 5 slm per channel
Feed Gas

Oxygen, Nitrogen (20 - 100 ppm of total flow), Carbon Dioxide (1000 - 2000 ppm of total flow)
Feed Gas Supply Pressure

60 psig (4.2 kg/cm²) nominal, 75 psig (5.3 kg/cm²) maximum, N2/CO2 pressure 10 psi higher than O2 pressure
Feed Gas Purity

99.9995% minimum
Operating Temperature

41 - 104°F (5 - 40°C)
Cooling Water Temperature Required

63 - 73°F (17 - 23°C)
Cooling Water Filtration Required

20µm
Cooling Water Quality Required

Demineralized
Cooling Water Minimum Flow Required

1.0 gpm (2.3 - 3.8 slm) minimum to 1.6 gpm max. per channel (depending on configuration)
Cooling Water Connections Required

1/2 in. compression (Swagelok®)
Cooling Water Flow Control/Indication Required

Variable - area flow meter with valve
Cooling Water Pressure Indication Required

Inlet pressure gauge
Voltage Requirements

208 volts AC (±10%), three phase

Current Requirements

15 Amps RMS, 30 Amps service, 31 Amps RMS, 50 amps service (depending on configuration) minimum of 10,000 A.I.C.
Frequency

50/60 Hz
Pressure Indication

Inlet pressure gauge for each gas
Exhaust Flow Rate

150 cfm (70.8 l/s)
Exhaust Type

SEMI Category 4 (accidental or emergency release of hazardous gas or vapor)
Exhaust Static Pressure

0.10 in. (2.54 mm) H2O minimum measured at the bottom of the duct flange adapter on cabinet
Control Air Pressure

70 - 100 psig
Control Air Type

CDA or dry nitrogen, 40µm filtered
Control Air Fitting

1/4 in. compression (Swagelok®)
Exhaust Connection

6 - in. diameter duct opening
Dimensions

24 x 75 x 36 in. (610 x 1575 x 914 mm) (width x height x depth)
Relative Humidity

30 - 90% (non - condensing)
Weight

600 lbs.(272 kg) for system with one generator,880 lbs.(400 kg) for system with four generators
Compliance

CE, S2 - 0302, F47
Altitude

Up to 3280 ft. (1000 m) above mean sea level

Features

Environmentally Friendly Solution

For gate oxides and high-k dielectric materials, one of the precursors needs to be an oxidizer. Ozone has many advantages over other oxidizers as a precursor for ALD and as a strong oxidizing agent. Ozone has a high redox potential, can be generated at the point-of-use, and it decays naturally into oxygen (2O3 ⇒ 3O2). Therefore, it is considered a "green" chemical. If required, ozone can also be destroyed at the output of the process chamber using a catalytic or thermal destruct unit. This significantly lowers chemical disposal cost, as the output is oxygen and contains no ozone. Ozone is very stable at room temperature, making it a good choice for most applications. In addition to ALD, typical ozone applications include chemical vapor deposition (CVD), photoresist strip, wafer cleaning, contaminant removal, surface conditioning, and oxide growth.

Multi-channel Capability

The AX8555 system is configurable with up to four (4) independent channels to support multiple ALD tools or chambers concurrently. Each channel can be matched to the specific concentration and flow required for your specific process. The ozone source for each channel is the production-proven AX8560 ozone delivery subsystem. It incorporates MKS patented, field-proven, high concentration, ultra clean ozone generation technology, as well as integrated ozone concentration monitor and flow control. The AX8555 includes all subassemblies required for stand-alone operation, including power distribution, an ambient ozone safety monitor, status indicator panel, and optional integrated ozone destructs for each channel.