General Purpose Mass Flow Controller
The MKS 1179 is a general purpose mass flow controller designed to measure and control the flow of gases in a wide variety of applications. The 1179 Mass-Flo® controllers are available with Full Scale ranges from 10 sccm to 20 slm, providing fast, repeatable flow control to as low as 0.2 sccm. It can also be used as a pressure controller when connected to a suitable pressure transducer.
The 1179 is a direct form-fit-function replacement for the most common MFC's on the market today. The standard 3-inch footprint enables the 1179 to drop directly into the same space without modifying existing gas lines. Electrical connectors are the same Type "D" connectors, with the same pin-outs, signals, and functions as their industry counterparts, so no cable or connector rewiring is necessary. The 1179 is compatible with MFC power supply and display electronics from MKS or other manufacturers.