1179C Mass-Flo®
General Purpose Mass Flow Controller

photo - 1179c Mass-Flo Mass Flow Controller

The MKS 1179 is a general purpose mass flow controller designed to measure and control the flow of gases in a wide variety of applications. The 1179 Mass-Flo® controllers are available with Full Scale ranges from 10 sccm to 20 slm, providing fast, repeatable flow control to as low as 0.2 sccm. It can also be used as a pressure controller when connected to a suitable pressure transducer.

The 1179 is a direct form-fit-function replacement for the most common MFC's on the market today. The standard 3-inch footprint enables the 1179 to drop directly into the same space without modifying existing gas lines. Electrical connectors are the same Type "D" connectors, with the same pin-outs, signals, and functions as their industry counterparts, so no cable or connector rewiring is necessary. The 1179 is compatible with MFC power supply and display electronics from MKS or other manufacturers.

  • Patented sensor design provides exceptional zero stability
  • Full scale flow ranges from 10 sccm to 20 slm for precise and repeatable flow measurement and control
  • Percent of full scale accuracy for analog configurations
  • Fast warm-up time minimizes expensive production downtime
  • Compatible with earlier MKS MFC and power supply/readout modules
  • Rigorous design and testing includes MTBF analysis and STRIFE testing to ensure long-term performance
  • Surface finish of wetted stainless surfaces, cleanroom processing, and minimal use of elastomer seals enable use in demanding clean processes
  • CE Mark and RoHS compliant – meets requirements for European Union
  • Two year warranty ensures quality and customer satisfaction

List pricing is available for registered users from the USA under "Configurations" (below). Register/log in here.

Configurations:

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Part NumberFull Scale RangeFittingsValveConnectorSealsPriceQTY
1179C01311CR1BV10 sccm of NitrogenSwagelok® 4 VCR® maleNormally closed15-pin Type "D"VitonQuote Only
1179C01311CS1BV10 sccm of NitrogenSwagelok® 1/4 inch tubeNormally closed15-pin Type "D"VitonQuote Only
1179C01321CR1BV20 sccm of NitrogenSwagelok® 4 VCR® maleNormally closed15-pin Type "D"VitonQuote Only
1179C01321CS1BV20 sccm of NitrogenSwagelok® 1/4 inch tubeNormally closed15-pin Type "D"VitonQuote Only
1179C01351CR1BV50 sccm of NitrogenSwagelok® 4 VCR® maleNormally closed15-pin Type "D"VitonQuote Only
1179C01351CS1BV50 sccm of NitrogenSwagelok® 1/4 inch tubeNormally closed15-pin Type "D"VitonQuote Only
1179C01312CR1BV100 sccm of NitrogenSwagelok® 4 VCR® maleNormally closed15-pin Type "D"VitonQuote Only
1179C01312CS1BV100 sccm of NitrogenSwagelok® 1/4 inch tubeNormally closed15-pin Type "D"VitonQuote Only
1179C01322CR1BV200 sccm of NitrogenSwagelok® 4 VCR® maleNormally closed15-pin Type "D"VitonQuote Only
1179C01322CS1BV200 sccm of NitrogenSwagelok® 1/4 inch tubeNormally closed15-pin Type "D"VitonQuote Only
1179C01352CR1BV500 sccm of NitrogenSwagelok® 4 VCR® maleNormally closed15-pin Type "D"VitonQuote Only
1179C01352CS1BV500 sccm of NitrogenSwagelok® 1/4 inch tubeNormally closed15-pin Type "D"VitonQuote Only
1179C01313CR1BV1,000 sccm of NitrogenSwagelok® 4 VCR® maleNormally closed15-pin Type "D"VitonQuote Only
1179C01313CS1BV1,000 sccm of NitrogenSwagelok® 1/4 inch tubeNormally closed15-pin Type "D"VitonQuote Only
1179C01323CR1BV2,000 sccm of NitrogenSwagelok® 4 VCR® maleNormally closed15-pin Type "D"VitonQuote Only
1179C01323CS1BV2,000 sccm of NitrogenSwagelok® 1/4 inch tubeNormally closed15-pin Type "D"VitonQuote Only
1179C01353CR1BV5,000 sccm of NitrogenSwagelok® 4 VCR® maleNormally closed15-pin Type "D"VitonQuote Only
1179C01353CS1BV5,000 sccm of NitrogenSwagelok® 1/4 inch tubeNormally closed15-pin Type "D"VitonQuote Only
1179C01314CR1BV10,000 sccm of NitrogenSwagelok® 4 VCR® maleNormally closed15-pin Type "D"VitonQuote Only
1179C01314CS1BV10,000 sccm of NitrogenSwagelok® 1/4 inch tubeNormally closed15-pin Type "D"VitonQuote Only
1179C01324CR1BV20,000 sccm of NitrogenSwagelok® 4 VCR® maleNormally closed15-pin Type "D"VitonQuote Only
1179C01324CS1BV20,000 sccm of NitrogenSwagelok® 1/4 inch tubeNormally closed15-pin Type "D"VitonQuote Only

Need help?

Contact an Applications Specialist by sending an email to MKS Instruments, or call 978-645-5500.