πPC PC90 Integrated Pressure Controller
for Closed Loop Pressure Measurement and Control of Process-Critical Applications
The πPC is a critical process control instrument in the MKS line of digital control, web-enabled products, providing the latest in pressure measurement and control technology necessary to meet the process demands of the semiconductor and other leading edge process industries.
The πPC Pressure Controller provides pressure measurement and control of process critical pressures utilizing MKS Instruments' industry leading Baratron capacitance manometer technology. The πPC is available with a Full Scale pressure from as low as 1000 torr up to 100 psia. Baratron capacitance manometers - well-known for their percent of Reading accuracy, stability and resolution - provide precise measurements at lower pressures and over a wider dynamic range than strain gage transducers.
The πPC Pressure Controller is a self-contained, compact, closed-loop electronic pressure control system designed for a wide range of pressure and flow conditions. It contains a capacitance manometer, normally closed or normally open control valve and closed-loop control electronics. The πPC is available in either an upstream or downstream pressure control configuration making it well suited for controlling process chamber backpressure or process gas delivery pressure. With either digital (DeviceNet or RS-485) or analog I/O and its Ethernet setup and diagnostics capabilities, the πPC is easily integrated into the process tool.