MKS Instruments Pumpkits

photo - Custom-manufactured Pumpkits

Customized piping to the vacuum pump.

This can include:

  • Spool piece with gauge or leak check port
  • Manual or pneumatic isolation valve
  • Flexible line

MKS Instruments Pumpkit Benefits:

  • Enables quick check when tool vacuum loss identified, as to its source
  • Eliminates many timely and costly pump swap-outs, rebuilds, and system requalifications
  • Allows pump running during tool PM's
  • Reduces the risk of restart problems
  • Removes the hazard of atmospheric exposure to the pump
  • Allows for pump-specific installation
  • Creates overall cost reduction


Purchase now or request a quote:
Enter a quantity and click "add to cart"

Part NumberPriceQTY
PumpkitsQuote Only

Need help?

Contact an Application Specialist by sending an email to MKS Instruments or call 303-449-9861.