IP66-rated, Multi-gas, Multi-range, Metal-sealed Mass Flow Controller for Flow Rates from 1 to 100 slm
The IM100A is a general purpose, metal-sealed MFC, that is well suited for harsh environments where resistance to liquid or dust ingress is critical. It meets these requirements with its IP66 enclosure design.
The IM100A is a digitally-controlled MFC with analog (0 to 5 VDC or 4-20 mA) and digital Profibus® I/O. Using the latest in MKS control algorithms, it provides fast and repeatable response to set point throughout the device control range with typical response times on the order of 500 milliseconds. The included digital calibration yields 1% of set point accuracy on the calibration gas. It uses the standard 3-inch footprint most often used by MFCs in the 5 sccm to 50 slm flow rate range without the need to modify existing gas line configurations, and operates with flow rates up to 100 slm, N2 equivalent.