High Flow Valves (HFV)
High Conductance, Large Port, Vacuum Isolation Valves
MKS High Flow Valves (HFV) are high conductance vacuum isolation valves for use with large line diameters. A welded stainless steel bellows allows for maximum stroke length and high conductance. The small diameter welded bellows also allows the reduction in size for the bonnet mounting while maintaining valve serviceability. The High Flow Valve uses a pulled Stainless Steel body and Aluminum sealing plate for weight reduction.