Ultra High Vacuum (UHV)
Metal-sealed Vacuum Isolation Valves
MKS Ultra High Vacuum (UHV) Valves are specially designed with Con-flat (CF) metal bonnet seals that limits outgassing and permeation allowing a lower system base pressure. A welded stainless steel bellows ensures a long cycle life with high conductance at the lowest base pressures. The UHV Valve's lifetime can extend to 1,000,000 cycles under clean conditions, increasing system uptime. The UHV Valve is assembled in a clean room for use in ultraclean system environments. The body is available with a choice of bead blasted or electropolished finishes.