Low-profile, Single-stage, Bellows-sealed Poppet Valves
MKS LoPro™ (Low-profile) Vacuum Valves have a small footprint that fits easily into existing, and new, vacuum systems. LoPro™ Valves are extremely reliable, with a lifetime that can extend to 1,000,000 cycles under clean conditions, greatly increasing system uptime. A formed stainless steel bellows prevents outgassing, virtual leaks, and particle entrapment between bellows convolutions that extends the valves life cycle over a conventional O-ring shaft sealed valve. The bellows' stroke length is optimized to assure a long cycle life while maintaining high conductance.