SenseStream & Virtual BlueBox
for Data Collection and Tool Interface
Enabling high-speed, multi-user connectivity, data integration, and sharing.
SenseStream provides the optimum solution for data integration and data sharing. Designed to manage and segment data requests from multiple users, the SenseStream multiplexes the data from the process tool and sensors and streams this data to the multiple applications and users, including the factory host. The open and flexible architecture of the SenseStream guarantees easy integration into existing fab environments, using SECS-I/HSMS protocols. The SenseStream application runs on our standard RMU2 hardware. Along with the SenseStream product, the MKS Virtual BlueBox software solution can be used to provide data collection capabilities, providing a next generation, seamless and transparent replacement of an existing MKS BlueBox solution.