High Performance Pressure-insensitive, Multi-gas, Multi-range Mass Flow Controllers
for Flow Rates up to 50 slm
The P9B pressure insensitive, multi-gas/multi-range mass flow controller features sub-750 millisecond control times and accuracy to within 1% of set point over a broad range of process gases, from "light" gases such as helium to "heavy" gases like SF6. P9B is a true multi-range/multi-gas MFC, minimizing MFC inventory requirements.
Using the P9B multi-gas/multi-range capability is made simple with embedded software and standard Ethernet interface that requires only a standard web browser and a PC. Critical gas parameters for most of the gases in use today by the semiconductor industry are already stored on the device - configuring is simply a matter of selecting the gas and specifying the range. The user interface also performs device monitoring & diagnostics during operation.