General Purpose, Multi-gas, Multi-range, Metal-sealed Mass Flow Controllers with a Meter Option for Flow Rates up to 50 slm
The GM50A digitally-controlled mass flow controller is available with either analog (0 to 5 VDC or 4 to 20 mA) or RS485, Profibus™, EtherCAT®, or DeviceNet™ I/O. The digital control electronics utilize the latest MKS control algorithms for fast and repeatable response to setpoint throughout the device control range. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of setpoint accuracy on the calibration gas. I/O protocols are designed to allow the GM50A to easily replace RS485, Profibus and DeviceNet versions on earlier generations of MKS as well as many other suppliers MFCs.
A standard 3-inch footprint enables its use without modifying existing gas line configurations. The GM50A/GM51A mass flow controller has an electropolished surface finish (the GM50A mass flow meter is not electropolished).