Rapid Isolation Valve
High Speed, Fast Closing Valve
MKS Rapid Isolation Valves offer extremely fast closing speeds to protect the vacuum system during a backpressure event caused by pump failure. Many valves do not close fast enough to prevent particles and turbulence from moving upstream and damaging the process.
Rapid Isolation Valves are based on popular MKS Vacuum Isolation Valves and are modified to achieve the rapid closing speeds. The table lists expected time improvements for valve closing speeds.