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GHW Series 13.56 MHz, 1.25, 2.5, and 5.0 kW High-Reliability RF Plasma Generators

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Overview

The GHW Series RF power generators deliver maximum rated output powers of 1250, 2500 and 5000 Watts at a frequency of 13.56 MHz. The GHW generators offer field-proven reliability, exceptional stability, and unsurpassed repeatability for high uptime and process yield. They are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.

Specifications

Type

GHW Series 13.56 MHz RF Plasma Generator
Frequency

13.56MHz ±0.005%
Power Output

GHW-12: 1250 W
GHW-25: 2500 W
GHW-50: 5000 W
Load Impedance Range

Unlimited
RF Stability/Spurious Output

Unconditionally stable for any load within operational limits < -45dBc
Harmonic Output & Distortion

< -40dBc
Load Mismatch Protection

GHW-12: Automatic - forward power limits typically 0.25ms after reverse power reaches a pre-programmed level = 16% of rated power.
GHW-25, GHW-50: Automatic - forward power limits typically 0.25ms after reverse power reaches a pre-programmed level = 20% of rated power.
Regulation Tolerance

GHW-12: >125 W: ±1.5% SP, <125 W: ± 3.0 W
GHW-25: >250 W: ±1.5% SP, <250 W: ± 6.0 W
GHW-50: >500 W: ±1.5% SP, <500 W: ± 10.0 W
Input AC Power

GHW-12: 200/208 VAC, 3/PE~ (3W+G) 14 A/PHASE, 380/400 VAC, 3/PE~ (3W+G) 7.5 A/PHASE
GHW-25: 200/208 VAC, 3/PE~ (3W+G) 15 A/PHASE, 380/400 VAC, 3/PE~ (3W+G) 7.5 A/PHASE
GHW-50: 200/208 VAC, 3/PE~ (3W+G) 30 A/PHASE, 380/400 VAC, 3/PE~ (3W+G) 15 A/PHASE

RF Connector

Type N
Interface

Standard: RS-232 Subminiature Type-D 9-pin digital; optional custom interface cards available.
Readout

Digital readout displays frequency and forward, reflected and load power.
Rack Mounting

EIA (Standard) 19-inch adapters supplied
Cooling System

GHW-12: Water flow at 2.0 Gal./Min. (7.6 LPM), minimum at +5°C to +35°C. Connections provided to accept 1/4 inch male (NPT) pipe thread.
GHW-25, GWH-50: Water flow at 2.0 Gal./Min. (7.6 LPM), minimum at +5°C to +35°C. Connections provided to accept 3/8 inch male (NPT) pipe thread.
Dimensions

GHW-12: 3.5 inches x 19 inches rack mount x 20.0 inches (89 x 483 x 508 mm.)
GHW-25: 5.25 inches x 19 inches rack mount x 20.5 inches (133 x 483 x 521 mm.)
GHW-50: 8.72 inches x 19 inches rack mount x 22.1 inches (221 x 483 x 560 mm.)
(H x W x D, excluding handles & connectors)
Weight

GHW-12: 32.5 lbs. (14.8 kg)
GHW-25: 55 lbs. (24.9 kg)
GHW-50: 91 lbs. (41.3 kg)
Compliance

CE, CAN/CSA-C22.2 No. 61010-1, UL 61010-1

Specifications

Type

GHW Series 13.56 MHz RF Plasma Generator
Frequency

13.56MHz ±0.005%
Power Output

GHW-12: 1250 W
GHW-25: 2500 W
GHW-50: 5000 W
Load Impedance Range

Unlimited
RF Stability/Spurious Output

Unconditionally stable for any load within operational limits < -45dBc
Harmonic Output & Distortion

< -40dBc
Load Mismatch Protection

GHW-12: Automatic - forward power limits typically 0.25ms after reverse power reaches a pre-programmed level = 16% of rated power.
GHW-25, GHW-50: Automatic - forward power limits typically 0.25ms after reverse power reaches a pre-programmed level = 20% of rated power.
Regulation Tolerance

GHW-12: >125 W: ±1.5% SP, <125 W: ± 3.0 W
GHW-25: >250 W: ±1.5% SP, <250 W: ± 6.0 W
GHW-50: >500 W: ±1.5% SP, <500 W: ± 10.0 W
Input AC Power

GHW-12: 200/208 VAC, 3/PE~ (3W+G) 14 A/PHASE, 380/400 VAC, 3/PE~ (3W+G) 7.5 A/PHASE
GHW-25: 200/208 VAC, 3/PE~ (3W+G) 15 A/PHASE, 380/400 VAC, 3/PE~ (3W+G) 7.5 A/PHASE
GHW-50: 200/208 VAC, 3/PE~ (3W+G) 30 A/PHASE, 380/400 VAC, 3/PE~ (3W+G) 15 A/PHASE

RF Connector

Type N
Interface

Standard: RS-232 Subminiature Type-D 9-pin digital; optional custom interface cards available.
Readout

Digital readout displays frequency and forward, reflected and load power.
Rack Mounting

EIA (Standard) 19-inch adapters supplied
Cooling System

GHW-12: Water flow at 2.0 Gal./Min. (7.6 LPM), minimum at +5°C to +35°C. Connections provided to accept 1/4 inch male (NPT) pipe thread.
GHW-25, GWH-50: Water flow at 2.0 Gal./Min. (7.6 LPM), minimum at +5°C to +35°C. Connections provided to accept 3/8 inch male (NPT) pipe thread.
Dimensions

GHW-12: 3.5 inches x 19 inches rack mount x 20.0 inches (89 x 483 x 508 mm.)
GHW-25: 5.25 inches x 19 inches rack mount x 20.5 inches (133 x 483 x 521 mm.)
GHW-50: 8.72 inches x 19 inches rack mount x 22.1 inches (221 x 483 x 560 mm.)
(H x W x D, excluding handles & connectors)
Weight

GHW-12: 32.5 lbs. (14.8 kg)
GHW-25: 55 lbs. (24.9 kg)
GHW-50: 91 lbs. (41.3 kg)
Compliance

CE, CAN/CSA-C22.2 No. 61010-1, UL 61010-1