Integrated LoPro™ (ILP)
Low-profile, Integrated Two Stage, Soft-start Isolation Valve
MKS Integrated LoPro™ (ILP) valves are pneumatically actuated isolation valves with a bypass valve integrated internally to the main valve. The main valve is a normally closed bellows sealed valve. The bypass valve is a normally closed O-ring shaft sealed valve located within the main stage. In the first stage, the bypass valve pumps down slowly from atmospheric pressure to a preset vacuum pressure defined by the users control sequence. In the second stage, the main valve opens, allowing use of full pumping speed.