TOOLweb® RGA Sensors
TOOLweb® RGA sensors are specially configured to monitor different tool and process environments. They can highlight a variety of process and tool issues to ensure throughput, yield and tool uptime is maximized while the occurrence of scrapped wafers and downtime is minimized. The following a selection of preconfigured TOOLweb® RGA sensors along with associated benefits:
300mm Resist-Torr™ Wafer Degas Monitor
Rapidly identifies and alarms the presence of wafer borne contaminants including photoresist and solvent residues from upstream cleaning processes. Protects the tool from the spread of contamination and associated particle problems.
PVD-HPQ3S™ PVD Process Monitor
Monitors PVD processes during both wafer processing and baseline conditions. Highlights issues associated with gas composition and process contaminants, including those linked to tool component failure.
Vision 2000-B™ Vacuum Baseline Monitor RGA
Tracks gases in the transfer chamber environment with correlation to process chamber slit valve positions so that the existence of leaks and the potential for process chamber cross-contamination can be highlighted and rectified.
Vision 2000-C™ RGA for CVD
Highlights the presence of contaminants and process excursions and can also be used for process qualification and optimization. In ALD, the Vision 2000-C™ RGA can be used to monitor drift and inconsistency in precursor delivery.
Learn more about TOOLweb® RGA:
TOOLweb® RGA home
TOOLweb® RGA Applications
TOOLweb® RGA Sensor Integration
Contact a Process Monitor Specialist by sending an email to MKS Instruments or call 408-750-0300.