Automation, Control & Sensing Solutions

MKS has the critical building blocks and experience to deliver the latest technologies for distributed automation control and process monitoring. We offer a complete Automation Platform Solution along with a suite of automation control hardware and software configurable modules that better automates processes via computer-controlled automation, while seamlessly integrating with existing MKS products to provide a complete solution for semiconductor and industrial manufacturing.

Our Sensing Solution combines a fiber optic probe with a single or multichannel temperature converter providing increased flexibility and ease of use.  MKS’ Fiber Optic Temperature Sensor, designed specifically to perform under conditions where traditional electrical sensors fail, achieves the highest measurement accuracy and repeatability over a wide temperature range for plasma-assisted semiconductor process such as deposition and etch.