MKS Automation Platform I/O

photo - MKS I/O Modules

The MKS Automation Platform can be configured with a variety of I/O Modules, depending on the type sensors, actuators, valves, and other devices that are being integrated with the MKS Programmable Automation Controller (PAC) or the MKS CM. MKS I/O slices communicate to the MKS PAC or CM via the L-BUS or EtherCAT, creating a scalable distributed I/O system.

AIO Analog Input/Output Module Analog IO (0-10V, ±10V, ±5V, 4-20mA, 0-20mA)
DIO Digital Input/Output Module Digital IO (0-24V, sink & source options)
MFC Mass Flow Controller Module Mass Flow Controller slice (15 & 9 pin MFC's)
Pressure Input Module Pressure Input module four 15 Pin D-sub MKS System Bus
PWM Pulse Width Modulating Slice Module Pulse Width Modulated Outputs (PWM outputs for SSR's/heaters)
PWR Power Supply Module Power module or extender (24VDC input, 5A)
Serial Communication Module Serial module for 9-pin D-Sub digital communication
TEMP Temperature Input Module Temperature Input (TC & RTD's - PT100 & PT1000)