The SA7610SAPP4 is a replaceable sapphire plasma tube for the AX7610S is a microwave plasma source, ideally suited for more severe CF4 CHF3 and NF3 chemistries.
Additional CAD file downloads are not available for this product.
SA7610SAPP4 - Drawings
Additional drawings are not available for this product.
SA7610SAPP4
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