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RF Plasma Generator, 5.0 kW, 2 MHz, NOVA
Model: NOVA-50A
RF Plasma Generator, 5.0 kW, 2 MHz, NOVA
RF Plasma Generator, 5.0 kW, 2 MHz, NOVA
Model: NOVA-50A
Overview
Overview
The NOVA®-50A 5.0 kW 2 MHz RF Plasma Generator is ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications. NOVA RF Plasma Generators are ideally suited for Plasma Enhanced Chemical Vapor Deposition (PECVD), High Density Plasma CVD (HDPCVD), etching and other thin film applications during the manufacture of integrated circuits, flat panel displays, and data storage devices.
Technical Specs
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TypeRF Plasma Generator
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Frequency2.00 MHz ±0.005%
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Dynamic Power Range10 - 5000 W
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Power Output5.0 kW
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Load Impedance RangeUnlimited
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RF Stability/Spurious OutputUnconditionally stable for any load within operational limits <-50dBc
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Harmonic Output & Distortion<-40dBc
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Load Mismatch ProtectionAutomatic, forward power limits typically 0.25ms after reverse power reaches a pre-programmed level .20% of rated power.
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Regulation Tolerance>500 W: <2.0% SP, <500 W: ±5.0 W
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Input AC Power200/208 VAC, 3/PE~ (3W+G) 32A/PHASE
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RF ConnectorType HN
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InterfaceStandard: RS-232 Subminiature, Type-D 9-pin digital, optional custom interface cards available.
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ReadoutDigital readout displays frequency and forward, reflected and load power.
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Rack Mounting19-inch adapters supplied
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CoolingWater
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Cooling SystemWater flow at 2.0 Gal./Min. (7.6 LPM) minimum at 5 - 35°C. Connections provided to accept 3/8 inch male (NPT) pipe thread.
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DimensionsRack Mount: 8.72 x 19 x 22.1 inches (221 x 483 x 560 mm)(height x width x depth) (excluding handles & connectors)
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Weight91 lbs (41.3 kg)
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ComplianceNRTL Listed: UL3111-1 (1994), CAN/CSA C22.2 No. 1010.1-92, EN61010-1:1993, A2:1995, EN50081-2: 1992, EN50082-2: 1995
RF Plasma Generator, 5.0 kW, 2 MHz, NOVA
Ultra-High Velocity