RF Plasma Generator, 5.0 kW, 2 MHz, NOVA

Technical Specs

  • Type
    RF Plasma Generator
  • Frequency
    2.00 MHz ±0.005%
  • Dynamic Power Range
    10 - 5000 W
  • Power Output
    5.0 kW
  • Load Impedance Range
    Unlimited
  • RF Stability/Spurious Output
    Unconditionally stable for any load within operational limits <-50dBc
  • Harmonic Output & Distortion
    <-40dBc
  • Load Mismatch Protection
    Automatic, forward power limits typically 0.25ms after reverse power reaches a pre-programmed level .20% of rated power.
  • Regulation Tolerance
    >500 W: <2.0% SP, <500 W: ±5.0 W
  • Input AC Power
    200/208 VAC, 3/PE~ (3W+G) 32A/PHASE
  • RF Connector
    Type HN
  • Interface
    Standard: RS-232 Subminiature, Type-D 9-pin digital, optional custom interface cards available.
  • Readout
    Digital readout displays frequency and forward, reflected and load power.
  • Rack Mounting
    19-inch adapters supplied
  • Cooling
    Water
  • Cooling System
    Water flow at 2.0 Gal./Min. (7.6 LPM) minimum at 5 - 35°C. Connections provided to accept 3/8 inch male (NPT) pipe thread.
  • Dimensions
    Rack Mount: 8.72 x 19 x 22.1 inches (221 x 483 x 560 mm)(height x width x depth) (excluding handles & connectors)
  • Weight
    91 lbs (41.3 kg)
  • Compliance
    NRTL Listed: UL3111-1 (1994), CAN/CSA C22.2 No. 1010.1-92, EN61010-1:1993, A2:1995, EN50081-2: 1992, EN50082-2: 1995

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