Residual Gas Analyzer, Flexible and Integration-ready, Microvision 2

Model: MICROVISION-2

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Overview

Microvision 2 is the latest innovation in RGA technology from MKS, designed to meet all of the traditional requirements for an RGA sensor but with data collection at speeds unachievable with previous generation technologies. In addition, the Microvision 2 is designed to collect data at millisecond speeds per data point even when measuring data over the full dynamic range of the RGA. This capability has been achieved without sacrificing any of the necessary robustness, reliability and support which have made MKS the world leader in RGA products over the widest range of applications from semiconductor tools or particle accelerators to general industrial applications. Microvision 2 is useful in a wide range of situations where knowing the contents of your chamber is critical to the success of your process.

Product Series Overview

Microvision 2 Flexible, Integration-ready Residual Gas Analyzer

Technical Specs

Type

Residual Gas Analyzer
Measurement Technique

Mass Spectrometry
Mass Range

100, 200, or 300 amu
Detector

Faraday
Faraday

1.5e^-11 Torr (2e^-11 mbar)
Filaments

Tungsten or Thoria coated Iridium
Software

Built-in web applications allowing RGA control and data acquisition using a platform independent web browser without the need for dedicated installed software, EasyView, Process Eye Professional and TOOLweb RGA Windows software packages for Windows 2000, XP, or Vista
Maximum Analyzer Operating Pressure

7.6e^-5 Torr (1e^-4 mbar)
Ion Source Sensitivity

2e^-4 A/mbar
Resolution

Better than 10% valley for peaks of equal height across mass range
Bake Out Temperature

250°C (with extender or electronics removed)
Operating Temperature

200°C Faraday only with electronics 10 - 40°C, 150°C Multiplier with electronics 10 - 40°C and pressure <1e^-8 mbar, 90°C Multiplier with electronics 10 - 40°C and pressure <1e^-5 mbar
Cross Beam Ion Source

Single, double, or triple, depending on configuration.
UHV Ion Source

Single, double, or triple, depending on configuration.
UHV Out-gassing Rate

<1e^-9 mbar -l/s
PVD Ion Source

Single, double, or triple, depending on configuration.
Zero Blast Effect

Double & Triple Filter: <5 ppm baseline levels next to mass 2 (not applicable with 5 in. single version)
Maximum Operating Conditions

10 - 40°C, 80% RH (non condensing)

Microchannel plate

3.8e^{-14 Torr (5e^-14 mbar)}
Single channel EM

7.6e^-15 Torr (1e^-14 mbar) triple configuration only
Electronics Weight on Flange

1.7 kg
Power

24 VDC, 3A external universal voltage supply (included)
Data Acquisition Method

Dedicated real time acquisition processor
Data Acquisition Speed

<3 ms per point for analog scanning
Data Collection Methods

Analog scanning, full mass range 8, 16 or 32 points/amu, Barchart scanning, Peak-jump collection of up to 15 peaks per scan, Complete recipe control to link multiple acquisition into a single scan, (Process Eye Professional and TOOLweb RGA only)
Settling Time

<20 ms (to 1 ppm of Maximum Signal)
Control Method

CE operating system processor with web-server interface
Command Structure

Documented ASCII command protocols
Multiplier Protection

Automatic removal of over-range peaks from all scan modes, dedicated multiplier inhibit line for over temperature or over-pressure and x-trip filament and multiplier protect for over-pressure
Communication

10/100 Base-T Ethernet, static or automatically assigned IP addresses
Interfaces

RJ45 socket: 10/100 Base-T Ethernet, 25 way D-type female: 16 configurable TTL I/O, one dedicated multiplier over temperature inhibit input, includes power for ±15V (100 mA), +24V (100 mA) and ±3.3V (100 mA), 15 way D-type female: 4 analog in (-11 - 11 V, 22 bit), 2 analog outputs (0 - 10V, 12 bit), includes power for ±15 V (100 mA), compound output from detector pre-amplifier, 9 way D-type female dedicated vacuum gauge port: -11 - 11 V 22 bit analog input, 1 digital input (gauge OK), 1 digital output (gauge enable) and gauge power +24 V (100mA), 3.5 mm jack socket: Opto-isolated input for filament protect or control with auto detection of presence of the jack plug as failsafe, 2.5 mm jack socket: Audio output for use with speaker and wired or wireless headphones
Number of Stored Source Settings

6 sets including ion source parameters, alignment, resolution, detector calibrations, Stored in electronics and recalled by EasyView, Process Eye Professional or TOOLweb RGA
Software Controlled Tuning Parameters

Electron energy, 20 - 100 eV, Emission current, 0 - 2 mA (5 mA degas), Ion energy, 0 - 10 V, Ion extraction, 0 to -130V, Filter pole bias, 0 to -10 to +10 V
Mounting Flange

DN 40 CF-F
Compliance

Compliant to RoHS Directive 2002/95/EC (control unit)

Technical Specs

Type

Residual Gas Analyzer
Measurement Technique

Mass Spectrometry
Mass Range

100, 200, or 300 amu
Detector

Faraday
Faraday

1.5e^-11 Torr (2e^-11 mbar)
Filaments

Tungsten or Thoria coated Iridium
Software

Built-in web applications allowing RGA control and data acquisition using a platform independent web browser without the need for dedicated installed software, EasyView, Process Eye Professional and TOOLweb RGA Windows software packages for Windows 2000, XP, or Vista
Maximum Analyzer Operating Pressure

7.6e^-5 Torr (1e^-4 mbar)
Ion Source Sensitivity

2e^-4 A/mbar
Resolution

Better than 10% valley for peaks of equal height across mass range
Bake Out Temperature

250°C (with extender or electronics removed)
Operating Temperature

200°C Faraday only with electronics 10 - 40°C, 150°C Multiplier with electronics 10 - 40°C and pressure <1e^-8 mbar, 90°C Multiplier with electronics 10 - 40°C and pressure <1e^-5 mbar
Cross Beam Ion Source

Single, double, or triple, depending on configuration.
UHV Ion Source

Single, double, or triple, depending on configuration.
UHV Out-gassing Rate

<1e^-9 mbar -l/s
PVD Ion Source

Single, double, or triple, depending on configuration.
Zero Blast Effect

Double & Triple Filter: <5 ppm baseline levels next to mass 2 (not applicable with 5 in. single version)
Maximum Operating Conditions

10 - 40°C, 80% RH (non condensing)

Microchannel plate

3.8e^{-14 Torr (5e^-14 mbar)}
Single channel EM

7.6e^-15 Torr (1e^-14 mbar) triple configuration only
Electronics Weight on Flange

1.7 kg
Power

24 VDC, 3A external universal voltage supply (included)
Data Acquisition Method

Dedicated real time acquisition processor
Data Acquisition Speed

<3 ms per point for analog scanning
Data Collection Methods

Analog scanning, full mass range 8, 16 or 32 points/amu, Barchart scanning, Peak-jump collection of up to 15 peaks per scan, Complete recipe control to link multiple acquisition into a single scan, (Process Eye Professional and TOOLweb RGA only)
Settling Time

<20 ms (to 1 ppm of Maximum Signal)
Control Method

CE operating system processor with web-server interface
Command Structure

Documented ASCII command protocols
Multiplier Protection

Automatic removal of over-range peaks from all scan modes, dedicated multiplier inhibit line for over temperature or over-pressure and x-trip filament and multiplier protect for over-pressure
Communication

10/100 Base-T Ethernet, static or automatically assigned IP addresses
Interfaces

RJ45 socket: 10/100 Base-T Ethernet, 25 way D-type female: 16 configurable TTL I/O, one dedicated multiplier over temperature inhibit input, includes power for ±15V (100 mA), +24V (100 mA) and ±3.3V (100 mA), 15 way D-type female: 4 analog in (-11 - 11 V, 22 bit), 2 analog outputs (0 - 10V, 12 bit), includes power for ±15 V (100 mA), compound output from detector pre-amplifier, 9 way D-type female dedicated vacuum gauge port: -11 - 11 V 22 bit analog input, 1 digital input (gauge OK), 1 digital output (gauge enable) and gauge power +24 V (100mA), 3.5 mm jack socket: Opto-isolated input for filament protect or control with auto detection of presence of the jack plug as failsafe, 2.5 mm jack socket: Audio output for use with speaker and wired or wireless headphones
Number of Stored Source Settings

6 sets including ion source parameters, alignment, resolution, detector calibrations, Stored in electronics and recalled by EasyView, Process Eye Professional or TOOLweb RGA
Software Controlled Tuning Parameters

Electron energy, 20 - 100 eV, Emission current, 0 - 2 mA (5 mA degas), Ion energy, 0 - 10 V, Ion extraction, 0 to -130V, Filter pole bias, 0 to -10 to +10 V
Mounting Flange

DN 40 CF-F
Compliance

Compliant to RoHS Directive 2002/95/EC (control unit)

Residual Gas Analyzer, Flexible and Integration-ready, Microvision 2

PART: MICROVISION-2

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Product Comparison

Residual Gas Analyzer, Flexible and Integration-ready, Microvision 2

Model: MICROVISION-2

Residual Gas Analyzer, Flexible and Integration-ready, Microvision 2

Residual Gas Analyzer, Flexible and Integration-ready, Microvision 2

Model: MICROVISION-2

Overview

Overview

Product Series Overview

Technical Specs

Technical Specs

Technical Specs

PART: MICROVISION-2

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