Mass Flow Controller, 200 slm, 4 VCR Male, DB15, Viton Valve Plug

Technical Specs

  • Type
    Mass Flow Controller
  • Calibration Gas
    N2 (or equivalent)
  • Control Range
    0.4 - 200 slm
  • Full Scale Flow Range
    200 slm
  • Fitting Type
    4 VCR male
  • Flow Input Output Signal
    1 - 5 VDC
  • Analog I/O Connector
    15-pin D-sub
  • Seal Material
    Viton
  • Maximum Inlet Pressure
    150 psig
  • Normal Operating Pressure Differential
    20 - 50 psid (with atmospheric pressure at the MFC outlet)
  • Typical Accuracy
    ±1.0% of Full Scale
  • Repeatability
    ±0.2% of Full Scale
  • Zero Temperature Coefficient
    <0.05% of Full Scale/°C
  • Span Temperature Coefficient
    <0.08% of Reading/°C
  • Warm-up Time
    ≤30 min (to within 0.2% of Full Scale of steady state performance)
  • Typical Settling Time
    ≤2 sec
  • Operating Temperature
    15 - 40°C
  • Wetted Materials
    316L stainless steel VAR (equivalent to 316 stainless steel SCQ for semiconductor quality), 316L stainless steel, Elgiloy®, Nickel
  • External Leak Integrity
    <1 x 10-10
  • Leak Integrity Through Closed Valve
    <1.0% of Full Scale at 25 psig to vacuum. (To assure no flow-through, a separate positive shut-off valve is required.)
  • Surface Finish
    16 µinch Ra
  • Weight
    <2 lbs. (0.9 kg)
  • Typical Current Required at Steady State
    300 mA (9 Watts)

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