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Ozonated Water Delivery System, 25-115 ppm, 5-140 lpm,, LIQUOZON® Stream
Model: LIQUOZON-STREAM
Ozonated Water Delivery System, 25-115 ppm, 5-140 lpm,, LIQUOZON® Stream
Ozonated Water Delivery System, 25-115 ppm, 5-140 lpm,, LIQUOZON® Stream
Model: LIQUOZON-STREAM
Overview
Overview
The LIQUOZON® Stream system delivers ozonated ultra pure water (DIO3) at a pressure of up to 2.8 bargauge (0.28 MPa) and at flow rates of up to 140 L/min.
Technical Specs
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TypeOzone Water Delivery System
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Ozone Concentration25 - 115 ppm
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Flow Rate5 - 140 lpm
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Feed GasO2
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Feed Gas QualityGrade 4 (purity >99.99%) or better
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Feed Gas Flow Rate20 slm (approximate)
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Feed Gas Inlet Pressure5.0 - 7.6 barg (0.50 - 0.76 MPag)
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Dopant GasCO2
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Dopant Gas Quality≥Grade 4.5 (purity≥99.995%)
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Dopant Gas Flow Rate0.5 slm (typical)
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Dopant Gas Inlet Pressure5.0 - 7.6 barg (0.50 - 0.76 MPag)
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UPW Quality>12 min @ 20°C
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UPW PressureAccording to the process demands. Typically with filtration, demineralization, reverse osmosis, deionization (<0.1 ppb Metals, <10 particles/ml of 0.1 µm size, free of organics)
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UPW Purity1.0 barg - 4.0 barg
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UPW Temperature15 - 25°C (59 - 77°F), rated 20°C (68°F)
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Cooling Water Flow Recommended9.0 L/min (typical)
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Cooling Water PressureRated 20°C, range 17 - 23°C
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Cooling Water Temperature5.0 barg (0.50 MPag)
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Cooling Water QualityDemineralized, filtration (≤20 µm)
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Liquid Wetted SurfacesPFA, PTFE, quartz glass
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Ambient Temperature15 - 25°C (59 - 77°F), rated 20°C (68°F)
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Wetted Surfaces316L stainless steel, PFA , PTFE
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Control InterfacesBinary in/out (dry contacts), RS232
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Power3/PE~ 200 - 208 V ±10%
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Dimensions610 x 1011 x 1,977 mm (24 x 39.8 x 77.8 inches) (width x length x height)
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Weight420 kg (approximate)
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ComplianceCE Mark, SEMI S2, F47 compliant
Resources & Downloads
Drawings & CADs
Ozonated Water Delivery System, 25-115 ppm, 5-140 lpm,, LIQUOZON® Stream
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