RF Plasma Generator, 5, 11, or 13 kW, 2MHz, KEINOS

Technical Specs

  • Type
    RF Plasma Generator
  • Frequency
    1.985 MHz
  • Frequency Tuning Range
    ±10%
  • Power Output
    5 kW, 11 kW, 13 kW
  • Accuracy
    ±5 W up to 500W, ±1% from 501 W to maximum power
  • Load Impedance Range
    Unlimited
  • Pulse Frequency
    Up to 50 KHz
  • Pulse Rise Time
    <5 µsec
  • Pulse Fall Time
    <5 µsec
  • Minimum Pulse Width
    10 µsec
  • Pulse Energy Repeatability
    <3%
  • Hot Swap or Pulse on the Fly
    Available
  • Pulse Between Two Set Points
    Available
  • Pulse Enabled
    Via internal or external TTL trigger, SMA
  • Pulse Mode
    Master or slave operation
  • Input AC Power
    200/208 VAC ±10%, 3 Phase, 50/60 Hz
  • Rated Current
    5 kW: 25 amps max, 11 & 13 kW: 55 amps max
  • RF Connector
    SQS standard (QC output)
  • Interface
    Ethernet, RS232
  • Dimensions
    5 kW: 5.25 x 17.5 x 24.5 inches, 11 & 13 kW: 8.30 x 17.8 x 25.5 inches (height x width x depth)
  • Compliance
    NRTL, CE EMC (EN60204, 61010), SEMI S2, S7, S14, SEMI F47, UL61010

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