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  6. HMPX60S-MKS

Microwave Plasma System, High Power, 6.0 kW, 2,440-2,470 MHz, Sapphire

Model: HMPX60S-MKS

Microwave Plasma System, High Power, 6.0 kW, 2,440-2,470 MHz, Sapphire

high power microwave plasma system
high power microwave plasma system
high power microwave plasma system

Microwave Plasma System, High Power, 6.0 kW, 2,440-2,470 MHz, Sapphire

Model: HMPX60S-MKS

Technical Specs

  • Type
    Microwave Plasma System
  • Power Output
    6.0 kW
  • Frequency
    2,440 - 2,470 MHz
  • Output Accuracy
    <1% closed loop control
  • Ambient Temperature
    Up to 40°C max
  • Generator to Head Distance
    Up to 100 feet max
  • Microwave Connections
    WR284F waveguide with CPR284F flanges
  • Power Requirements
    200-208 VAC, 3 phase, 50/60 Hz
  • Autotune
    <1.5 seconds with <2% reflected power
  • Chemistries
    O2, N2H2, N2, H2O, NH3, H2
  • Applicator Material
    Sapphire
  • Operating Pressure
    1 - 10 Torr
  • Compliance
    CE
  • Configuration
    KF40, custom
  • Cooling
    Water: 1 GPM, 20 - 30°C, 71 PSI max (applicator requires exclusive water cooling supply at 0.50 GPM)
  • Power Supply Generator Dimensions
    (7U rack) 19 x 12.2 x 20.03 inches (482.6 x 309.88 x 508.76 mm) (height x width x depth)
  • Power Head Magnetron Head Dimensions
    9.85 x 9.85 x 16 inches (250.19 x 250.19 x 406.4 mm) (height x width x depth)
  • Power Head Magnetron Head Cooling
    Water: 1 GPM, 20 - 30°C, 71 PSI max
  • Regulation
    ±3% of output power
  • Total Gas Flow
    1 - 10 slm
  • Remote Control
    Analog, RS485

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