Mass Flow Verifier, 1% of Reading Accuracy, 5 - 3000 sccm

Technical Specs

  • Type
    Mass Flow Verifier
  • Repeatability
    ±0.5% of Reading
  • Reproducibility
    ±0.3% of Reading
  • Pressure Range
    100 Torr
  • Pressure Accuracy
    0.25% of Reading
  • Proof Pressure
    45 psia
  • Burst Pressure
    150 psig
  • Minimum Penumatic Air Supply Pressure
    80 psig
  • Maximum Penumatic Air Supply Pressure
    100 psig
  • Span Temperature Coefficient
    <0.002% Reading/°C
  • Warm-up Time
    60 minutes
  • Operating Temperature
    10 - 40°C
  • Temperature Display
    0 - 100°C
  • Temperature Accuracy
    ± 2°C
  • Temperature Resolution
    0.1°C
  • Storage Humidity
    0 - 95% RH non-condensing
  • Storage Temperature
    -20 - 60°C (-4 - 160°F)
  • Control Interface
    DeviceNet: 5-pin DeviceNet Micro Connector Type, EtherCAT: Dual RJ-45 (Comm.) M8 Male 5pin (PWR)
  • Diagnostic Interface
    Ethernet RJ-45 female
  • Input Voltage
    DeviceNet: 11-25 VDC, EtherCAT: 11-25VDC +24 VDC (±10%)
  • Maximum Current Required at Start-up
    +24 VDC (±5%) @ 500 mA
  • Average Current Required at Steady State
    +24 VDC (±5%) @ 375 mA (valves closed)
  • Gas Supply Fitting
    Swagelok® compatible 8-VCR® female rotatable
  • Vacuum Supply Fitting
    Swagelok® compatible 8-VCR® male type, rotatable
  • Pneumatic Air Supply Fitting
    1/8 inch one-touch quick connect tube
  • External Leak Integrity
    <1 x 10-9 scc/sec He
  • Wetted Materials
    316L SST passivated, Inconel, Incoloy, 316 nickel-plated stainless steel
  • Valve Seat Material
    PCTFE with Elgiloy® Diaphragm
  • Surface Finish
    <32 µinches Ra
  • Dimensions
    6.98 x 10.0 x 10.0 in. (177.3 x 254.0 x 254.0 mm) (height x width x length)
  • Weight
    23.9 lbs (10.9 kg)
  • Compliance
    CE
  • Temperature Readout Units
    °C
  • Full Scale Verification Range
    5 - 3000 sccm (N2 equivalent)
  • Typical Accuracy
    ±1.0% of Reading

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