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Description
GM100A Mass Flow Controller, Multi-gas, Multi-range, Metal-sealed, 50-100 slm

Specifications

  • Full Scale Flow Range
    50,000 - 100,000 sccm (N2 equivalent)
  • Control Range
    2% to 100% of Full Scale
  • Flow Input Output Signal
    Voltage: (0 to 5 VDC) 15 pin Type "D" male, 9 pin Type "D" male, Current: (4 to 20 mA) 15 pin Type "D" male
  • Maximum Inlet Pressure
    150 psig
  • Normal Operating Pressure Differential
    50,000 - 100,000 sccm; 40 to 80 psid
  • Proof Pressure
    1000 psig
  • Burst Pressure
    1500 psig
  • Typical Accuracy
    ± 1% of set point for 20 to 100% Full Scale, ±0.2% of Full Scale for 2 to 20% Full Scale
  • Repeatability
    ±0.3% of Reading
  • Resolution
    0.1% of Full Scale
  • Zero Temperature Coefficient
    <0.05% of Full Scale/°C
  • Span Temperature Coefficient
    <0.08% of Reading/°C
  • Inlet Pressure Coefficient
    <0.02% of Reading/psi
  • Typical Settling Time
    <750 msec., typical above 10% Full Scale
  • Warm-up Time
    30 minutes
  • Operating Temperature
    10° to 50°C
  • Storage Humidity
    0 to 95% Relative Humidity, non-condensing
  • Storage Temperature
    -20° to 80°C
  • External Leak Integrity
    <1 x 10-10 (scc/sec He)
  • Leak Integrity Through Closed Valve
    <1.0% of Full Scale at 40 psig inlet to atmosphere
  • Wetted Materials
    316L Stainless Steel VAR, 316 Stainless Steel, Elgiloy®, Nickel
  • Surface Finish
    10µ inch average Ra
  • Weight
    3 lbs (1.4 kg)
  • Compliance
    CE

Features

Communication Options/Specifications

Digital I/O DeviceNet™ RS485 Profibus® EtherCAT® PROFINET®
Input Power Required +11 to +25 VDC per (<2 watts) +15 to +24 VDC (<2 watts) +15 to +24 VDC (<2 watts) +24 VDC (<3 watts) +24 VDC (<3 watts)
Connector 5 pin micro connector (power and comm.) 9 pin Type D male (power and comm.) 9 pin Type D male (power)
9 pin Type D female (comm.)		 2 x RJ-45 (comm.) male, M8 male,
5 pin (power)		 2 x RJ-45 (comm.) male, M8 male,
5 pin (power)
Data Rate Switch/Selection 4 positions: 125, 250, 500K (Default)
(programmable over network)		 No switch Set data rate via RS485 No switch Set data rate via Profibus No switch No switch
Comm. Rate(s) 125 Kbps; 250 Kbps; 500 Kbps 9.6 Kbps; 19.2 Kbps 38.4 Kbps 9.6 Kbps to 12 Mbps 100 Mbps 100 Mbps
MAC ID Switches/Addresses 2 switches, 10 positions; 0,0 to 6,3 1 to 254 Set address over RS485 Station Addresses 0,0 to 9,9 2 switches, 10 positions 3 switches, 16 positions N/A
Network Size Up to 64 nodes Up to 32 nodes Up to 99 nodes Up to 4095 nodes N/A
Visual Indicators LED Network (green/red)
LED Module (green/red)		 LED Comm (yellow)
LED Error (red)		 LED Comm (green/red)
LED Error (green/red)		 LED Power (green)
LED Run (green)
LED Error (red)
LED Comm (green)		 LED Maint (amber)
LED BUS Fault (red)
LED Ready (green)
LED Sys Fault (red)
Compliance CE CE CE CE CE

Wide Choice of Digital and Analog Interfaces

The GM100A digitally controlled MFC is available with either analog or digital I/O. The digital control electronics utilize the latest in MKS control algorithms providing fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. The GM100A’s analog and digital I/O can easily be used to replace those same I/O types of the 1179A MFCs. All GM100As include Modbus as an available secondary I/O (excludes PROFINET® and EtherCAT®).

Standard 3 inch Footprint

The GM100A utilizes the standard 3 inch footprint most often used by mass flow controllers in the 5 sccm to 50 slm flow rate range without the need to modify existing gas line configurations, and now operates with flow rates up to 100 slm, N2 equivalent.

Metal Sealed

The GM100A metal sealed MFC features a 10 µ inch electropolished 316L surface finish which enables this mass flow controller for use with use in high purity applications.

Percent of Setpoint Accuracy

Included digital calibration yields 1% of set point accuracy with N2 calibration gas for 20 to 100% of the full scale flow range.  Set point accuracy enables precise process control vs accuracy stated relative to full scale.  For mass flow rates of 2 to 20% full scale the accuracy is ±0.2% of full scale.

Embedded User Interface

An embedded user interface provides the ability to easily change device range and user gas which reduces inventory requirements. You can also monitor MFC functionality and collect performance data in-situ.

Patented Thermal Sensor

A well proven, patented thermal sensor design provides exceptional zero stability. US Patent No 5461913.

Resources

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