RF Plasma Generator, 1.25 kW, 13.56 MHz, GHW Series

Technical Specs

  • Type
    RF Plasma Generator
  • Frequency
    13.56 MHz ±0.005%
  • Dynamic Power Range
    10 - 1250 W
  • Power Output
    1.25 kW
  • Load Impedance Range
    Unlimited
  • RF Stability/Spurious Output
    Unconditionally stable for any load within operational limits <-45dBc
  • Harmonic Output & Distortion
    <-40dBc
  • Load Mismatch Protection
    Automatic, forward power limits typically 0.25ms after reverse power reaches a pre-programmed level = 16% of rated power.
  • Regulation Tolerance
    >125 W: ±1.5% SP, <125 W: ± 3.0 W
  • Input AC Power
    200/208 VAC, 3/PE~ (3W+G) 14 A/PHASE, 380/400 VAC, 3/PE~ (3W+G) 7.5 A/PHASE
  • RF Connector
    Type N
  • Interface
    Standard: RS-232 Subminiature Type-D 9-pin digital, optional custom interface cards available.
  • Readout
    Digital readout displays frequency and forward, reflected and load power.
  • Rack Mounting
    EIA (Standard) 19 inch adapters supplied
  • Cooling
    Water
  • Cooling System
    Water flow at 2.0 Gal./Min. (7.6 LPM) minimum at 5 - 35°C. Connections provided to accept 1/4 inch male (NPT) pipe thread.
  • Dimensions
    Rack Mount: 3.5 x 19 x 20.0 inches (89 x 483 x 508 mm) (height x width x depth)
  • Weight
    32.5 lbs. (14.8 kg)
  • Compliance
    NRTL Listed: UL3111-1 (1994), CAN/CSA C22.2 No. 1010.1-92, EN61010-1:1993, A2:1995, EN50081-2: 1992, EN50082-2: 1995

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