RF Plasma Generator, 600 W, 13.56 MHz, 25-pin Analog Interface, Half Rack
Model: ELITE-600HA-01
RF Plasma Generator, 600 W, 13.56 MHz, 25-pin Analog Interface, Half Rack
RF Plasma Generator, 600 W, 13.56 MHz, 25-pin Analog Interface, Half Rack
Model: ELITE-600HA-01
Overview
Overview
The elite™ 600HA-01 RF Plasma Generator provides 600 Watts of power at 13.56 MHz in an air-cooled half rack housing with a 25-pin analog and RS232 interfaces. elite™ RF plasma generators provide state-of-the art technology in a compact air-cooled package. Each elite™ RF Power Supply is designed with high speed closed loop control, a class E RF deck and a switching modulator for superior output performance. Its design utilizes a single printed circuit board assembly for the full rack product virtually eliminating all internal wires and connectors and thereby providing the highest reliability available. elite RF Plasma Generators may be used as source or bias generators for continuous operation or as stand-alone batch tools, and is ideally suited for Solar, LED, MEMs and semiconductor applications.
Technical Specs
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TypeRF Plasma Generator
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Frequency13.56 MHz ±0.005%
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Dynamic Power Range1 - 600 W
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Power Output600 W
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Output Stability-20 dBc
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Accuracy±2 W (1-100 W), ±2% (101W - 600W)
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Harmonic Output-30 dBc
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Input AC Power110 - 253 VAC, Single phase, 50Hz/60Hz
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RF ConnectorType N
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Interface25 pin Analog, RS232
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ReadoutNo
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Remote Digital InterfaceRS-232 via DB9F
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Analog Interface25-pin DB25F
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Commanded Power Repeatability± 1%
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CoolingAir-cooled
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Operating Temperature5 - 40°C
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Set Point Response Time<10 ms
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Power Switch2U, full rack: Front Panel Switch, 3U, half rack: Rear Panel Switch
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Common Exciter I/OBNC
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AC Input ConnectorIEC Compliant Inlet
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LED IndicatorsPWR and STAT on rear panel
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Watts Nominal into 1.1:1600 W
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Watts Nominal into 1.5:1600 W
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Watts Nominal into 2:1486 W
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Watts Nominal into 3:1384 W
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Watts Nominal into inf:1200 W
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AC Line Hum and Noise-30 dBc
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PSU Switching Freq and Harmonics-30 dBc
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Rack SizeHalf Rack
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Dimensions2U, full rack: 17 x 15 x 3.5 inches (width x depth x height), 3U, half rack: 8.5 x 15 x 5.25 inches (width x depth x height)
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Weight9.2 kg
RF Plasma Generator, 600 W, 13.56 MHz, 25-pin Analog Interface, Half Rack
Ultra-High Velocity