RF Plasma Generator, 600 W, 13.56 MHz, 25-pin Analog Interface, Full Rack

Technical Specs

  • Type
    RF Plasma Generator
  • Frequency
    13.56 MHz ±0.005%
  • Dynamic Power Range
    1 - 600 W
  • Power Output
    600 W
  • Output Stability
    -20 dBc
  • Accuracy
    ±2 W (1-100 W), ±2% (101W - 600W)
  • Harmonic Output
    -30 dBc
  • Input AC Power
    110 - 253 VAC, Single phase, 50Hz/60Hz
  • RF Connector
    Type N
  • Interface
    25 pin Analog, RS232
  • Readout
    No
  • Remote Digital Interface
    RS-232 via DB9F
  • Analog Interface
    25-pin DB25F
  • Commanded Power Repeatability
    ± 1%
  • Cooling
    Air-cooled
  • Operating Temperature
    5 - 40°C
  • Set Point Response Time
    <10 ms
  • Power Switch
    2U, full rack: Front Panel Switch, 3U, half rack: Rear Panel Switch
  • Common Exciter I/O
    BNC
  • AC Input Connector
    IEC Compliant Inlet
  • LED Indicators
    PWR and STAT on rear panel
  • Watts Nominal into 1.1:1
    600 W
  • Watts Nominal into 1.5:1
    600 W
  • Watts Nominal into 2:1
    486 W
  • Watts Nominal into 3:1
    384 W
  • Watts Nominal into inf:1
    200 W
  • AC Line Hum and Noise
    -30 dBc
  • PSU Switching Freq and Harmonics
    -30 dBc
  • Rack Size
    Full Rack
  • Dimensions
    2U, full rack: 17 x 15 x 3.5 inches (width x depth x height), 3U, half rack: 8.5 x 15 x 5.25 inches (width x depth x height)
  • Weight
    9.2 kg

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