Compare Description Drawings, CAD & Specs Availability Price
baratron heated capacitance manometer with etch sensor
E29H.1TBFL1B
Heated Capacitance Manometer w/Etch Sensor, 0.1 Torr, 100°C, 8 VCR-F, DB15 w/Thread Lock, 0.50%/Rdg Accuracy, Vertical Calibration
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 E29H.1TBFL1B Heated Capacitance Manometer w/Etch Sensor, 0.1 Torr, 100°C, 8 VCR-F, DB15 w/Thread Lock, 0.50%/Rdg Accuracy, Vertical Calibration
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baratron heated capacitance manometer with etch sensor
E29H.1TDFL6B
Heated Capacitance Manometer w/Etch Sensor, 0.1 Torr, 100°C, NW16 ISO-KF, DB15 w/Thread Lock, 0.50%/Rdg Accuracy, Vertical Calibration, Status LED
$3,198
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 E29H.1TDFL6B Heated Capacitance Manometer w/Etch Sensor, 0.1 Torr, 100°C, NW16 ISO-KF, DB15 w/Thread Lock, 0.50%/Rdg Accuracy, Vertical Calibration, Status LED
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 $3,198
baratron heated capacitance manometer with etch sensor
E29H11TBEL1B
Heated Capacitance Manometer w/Etch Sensor, 10 Torr, 100°C, 8 VCR-F, DB15 w/Thread Lock, 0.25%/Rdg Accuracy, Vertical Calibration
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 E29H11TBEL1B Heated Capacitance Manometer w/Etch Sensor, 10 Torr, 100°C, 8 VCR-F, DB15 w/Thread Lock, 0.25%/Rdg Accuracy, Vertical Calibration
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baratron heated capacitance manometer with etch sensor
E29H11TDCJ2B
Heated Capacitance Manometer w/Etch Sensor, 10 Torr, 45°C, NW16 ISO-KF, DB15 w/Thread Lock, 0.12%/Rdg Accuracy, Vertical Calibration, Status LED
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 E29H11TDCJ2B Heated Capacitance Manometer w/Etch Sensor, 10 Torr, 45°C, NW16 ISO-KF, DB15 w/Thread Lock, 0.12%/Rdg Accuracy, Vertical Calibration, Status LED
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baratron heated capacitance manometer with etch sensor
E29HU2TDEJ6B
Heated Capacitance Manometer w/Etch Sensor, 0.02 Torr, 45°C, NW16 ISO-KF, DB15 w/Thread Lock, 0.25%/Rdg Accuracy, Horizontal Calibration, Status LED
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 E29HU2TDEJ6B Heated Capacitance Manometer w/Etch Sensor, 0.02 Torr, 45°C, NW16 ISO-KF, DB15 w/Thread Lock, 0.25%/Rdg Accuracy, Horizontal Calibration, Status LED
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baratron heated capacitance manometer with etch sensor
E29HU5TBFL1B
Heated Capacitance Manometer w/Etch Sensor, 0.05 Torr, 45°C, 8 VCR-F, DB15 w/Thread Lock, 0.50%/Rdg Accuracy, Vertical Calibration
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 E29HU5TBFL1B Heated Capacitance Manometer w/Etch Sensor, 0.05 Torr, 45°C, 8 VCR-F, DB15 w/Thread Lock, 0.50%/Rdg Accuracy, Vertical Calibration
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Configuration Options

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Description
baratron heated capacitance manometer with etch sensor E29H Heated Capacitance Manometer, 0.02-100 Torr, Etch Sensor, 9-pin D-Sub Connector

Specifications

  • Type
    Vacuum/pressure Transducer
  • Measurement Type
    Absolute
  • Sensor Temperature
    Controlled to 45°C or 100°C
  • Full Scale Pressure Ranges
    0.02 (45°C only), 0.05, 0.1, 0.25, 1, 2, 10, 20, 100, 1000, 2000, 5000, 10000, 15000, 20000, 25000 Torr
  • Analog Output
    0-10 VDC into >10K Ω load
  • Analog Connector
    9-pin D-sub
  • Span Temperature Coefficient
    0.02% of Reading/°C
  • Operating Temperature Range
    45°C version: 15-40°C
    100°C version: 15-50°C
  • Volume
    6.3 cc
  • Warm-up Time
    2 hours for 1-25,000 Torr ranges
    4 hours for ranges < 1 Torr
  • Overpressure Limit
    45 psia (310 kPa) or 120% Full Scale, whichever is greater
  • Exposed Materials
    Inconel®
  • Power Requirements
    ±15 VDC±5% @ 0.25 Amps (0.6 Amps for 100°C version)
  • Compliance
    CE

Features

Baratron® Capacitance Manometer Technology

Capacitance manometers are electro-mechanical gauges that can measure both pressure and vacuum. The capacitance gauge translates a pressure-modulated movement in a thin diaphragm into an electrical signal proportional to the pressure. The pressure sensor is the thin diaphragm that is exposed to the pressure or vacuum being measured via the inlet tube. An electrode is mounted in the reference cavity behind the diaphragm. Pressure differences between the process and the reference cavity deflect the diaphragm slightly, changing the distance between it and the electrode. Variations in this distance produce variations in the capacitance between the diaphragm and the electrode creating an electrical signal that is proportional to the pressure change. Since differences in the capacitance signal are produced by physical changes within the manometer and not by changes in the gas properties, pressure measurements by the capacitance manometer are independent of the composition of the gas being measured.

Gas independent pressure measurement with a Baratron® capacitance manometer. Schematic shows the internal components and functional zones.

Percent of Reading Accuracy

Accuracy is specified as a percent of Reading, not Full Scale, as seen in some of the lower performance devices. Percent of Reading accuracy provides you with an even more accurate output signal in the lower scale of the pressure range, where it is needed most.

Internally Heated to 45°C or 100°C

These capacitance manometers are temperature controlled to 45°C or 100°C for improved accuracy. Unheated versions are exposed to ambient temperature variations which can degrade the sensor accuracy. These devices have the sensor enclosed in a volume that is maintained at a constant temperature above ambient. This solution improves the manometer’s accuracy and repeatability and lowers instrument drift by reducing or eliminating process contamination within the manometer. Heated manometers are recommended for applications that require maximum accuracy and repeatability, operate above ambient temperature and for those processes that employ hot gases.

The pressure sensor is located inside a 45°C or 100°C constant temperature oven for improved pressure measurement accuracy.

Absolute Pressure Measurement

These Baratron® pressure transducers are referenced to vacuum for absolute pressure measurement. Applications include: vacuum furnaces, freeze-drying of fruits and vegetables, gas lasers, automotive component testing, bottle coatings, and vacuum distillation.

All-Inconel® Wetted Surfaces

These pressure transducers feature all Inconel® construction of the pressure sensor allowing it to operate without damage in virtually any chemical environment, including exposure to halogens, deionized water and steam, and ozone.

0 to 10 VDC Proportional Analog Output

These Baratron® capacitance manometers feature a high-level 0-10 VDC analog output signal that is linear with pressure. This analog output can be interfaced with an MKS pressure controller, an MKS power supply/display instrument, or any instrument that meets these requirements.

9-pin Type "D" Pin-outs

Pin Description
1 Pressure Output
2 No Connection
3 No Connection
4 +15 VDC
5 -15 VDC
6 No Connection
7 External Zero
8 Pressure Common
9 Power Common

Recommended for Etch Processes

MKS has implemented solutions within the manometer’s pressure sensing element to minimize the effects of process byproducts and process gases. For processes that generate large quantities of condensable byproducts, MKS recommends the etch baffle sensor that significantly reduces the ability of byproducts to reach the sensor, minimizing process-induced zero drift. For very low pressure processes where fluorine burn-in is the main issue, MKS recommends the fluorine friendly (FF) sensor offering the ultimate in short- and long-term stability in fluorine chemistry.

Resources

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