The E28FU5TBF6B e-Baratron® Ethernet-Enabled, 100°C Heated Absolute Capacitance Manometer, with an Etch Sensor features 0.05 Torr full scale pressure measurement with 0.5% accuracy, horizontal calibration, and a Swagelok® 8 female VCR® fitting. It features structures in the sensor housing that eliminate process byproducts from depositing on the surface of the diaphragm, minimizing drift. Included heater and temperature status LED/switches indicate that the heater is at the 100°C set point. Updated temperature control electronics to provide superior long-term stability and repeatability. Based on established Baratron® capacitance manometer technology, the sensor's wetted surfaces are Inconel® for excellent resistance to corrosive gases. The contemporary stainless steel package provides a cleanroom-compatible product. The product is interchangeable with earlier 128, 628A, 628B, 628D, E28B, and E28D Baratron® capacitance manometers and can be used with MKS power supplies, display units and pressure controllers, or the user's compatible power supply/readout devices.