New Flow Ratio Controller, 4-zone, EtherCAT

Technical Specs

  • Type
    Flow Ratio Controller
  • Full Scale Flow Range
    500, 1000, 2000, and 10,000 sccm per channel (N2 equivalent)
  • Maximum Operating Outlet Pressure
    200 Torr at maximum flow rate through all channels
  • Maximum Allowable Outlet Pressure Differential
    50 Torr with the same percentage flow through all channels (highest to lowest pressure channel)
  • Normal Operating Pressure Differential
    <150 Torr, Except, <450 Torr for 10K/10K
  • Typical Accuracy
    1 ± 2% set point (for percent set points above 10%)
  • Repeatability
    ±0.3% of set point
  • Resolution
    0.02% of channel Full Scale
  • Zero Temperature Coefficient
    0.05% Full Scale/° C (500 ppm)
  • Span Temperature Coefficient
    <0.08% of Reading/° C (800 ppm)
  • Typical Settling Time
    <3 seconds (typical dependent on downstream conductance matching)
  • Warm-up Time
    60 minutes (minimum with device powered and at equilibrium with ambient)
  • Operating Temperature
    10 - 60°C
  • Storage Temperature
    -20 - 65°C
  • Storage Humidity
    0 - 95% relative humidity, non-condensing
  • Temperature Display
    0 - 100°C
  • Temperature Accuracy
    +2°C
  • Temperature Resolution
    0.1°C
  • Fitting Type
    4 VCR male
  • External Leak Integrity
    <1x10-10 (scc/sec He)
  • Leak Integrity Through Closed Valve
    <2% of channel Full Scale at 500 Torr differential to <10 Torr
  • Wetted Materials
    316 Stainless Steel VAR (equivalent to 316 Stainless Steel SCQ for semiconductor quality), 316 Stainless Steel nickel, Inconel®, KM-45, PTFE
  • Surface Finish
    5 microinch average Ra
  • Connector
    2 x RJ-45 (comm.) male, M8 male, 5 pin (power)
  • Power Requirements
    11 - 25 VDC
  • Set Point Command Signal
    Digital
  • Maximum Inlet Pressure
    150 psig (non-operational)
  • Channels
    4
  • Percentage Flow Control Range
    0, 5 - 100% Full Scale
  • Percentage Range
    0, 5 - 100% of total flow within flow channel control range
  • Temperature Readout Units
    °C
  • Communication
    EtherCAT
  • Compliance
    CE

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