Flow Ratio Controller, 2 Channels, DeviceNet

Technical Specs

  • Type
    Flow Ratio Controller
  • Full Scale Flow Range
    500, 1000, 2000, 10,000 sccm per channel (N2 equivalent)
  • Maximum Operating Outlet Pressure
    200 Torr (will operate with outlet pressures above 200 Torr) For device performance at higher pressures, consult MKS Application Engineers.
  • Maximum Allowable Outlet Pressure Differential
    50 Torr (between Q1 and Q2)
  • Normal Operating Pressure Differential
    <150 Torr (<450 Torr for 10,000/10,000)(N2)
  • Proof Pressure
    1000 psig
  • Burst Pressure
    1500 psig
  • Input Flow Range
    5 - 100% of each channel Full Scale rating (N2 equivalent)
  • Ratio Control Range
    1:1 to 20:1 and 20:1 to 1:1
  • Typical Accuracy
    2% of ratio set point
  • Repeatability
    0.3% of ratio set point
  • Resolution
    0.02% of channel Full Scale
  • Zero Temperature Coefficient
    0.05% Full Scale/°C per channel
  • Span Temperature Coefficient
    0.08% Reading/°C per channel
  • Typical Settling Time
    <2 seconds
  • Warm-up Time
    <30 minutes
  • Operating Temperature
    10 - 40°C
  • Storage Temperature
    -20 - 65°C
  • Storage Humidity
    0 - 95% relative humidity, non-condensing
  • Temperature Display
    0 - 100°C
  • Temperature Accuracy
    ±2°C
  • Temperature Resolution
    0.1°C
  • Fitting Type
    4 VCR male
  • Display
    4 digits for value, 4 characters for unit
  • External Leak Integrity
    <1x10-10 (scc/sec He)
  • Leak Integrity Through Closed Valve
    <2% of Channel Full Scale at 400 Torr differential
  • Wetted Materials
    316 stainless steel VAR (equivalent to 316 stainless steel SCQ for semiconductor quality), 316 stainless steel, Inconel®, KM-45, PTFE
  • Surface Finish
    5 microinch average Ra
  • Weight
    Less than 5 lbs. (2.3 kg)
  • Connector
    Digital I/O: 5-pin microconnector (DeviceNet), Analog: 9-pin D male
  • Power Requirements
    Digital I/O: 11-25 VDC, Analog: +15 to 24 VDC±5%
  • Power Consumption
    <9 Watts
  • Set Point Command Signal
    Digital I/O: Digital, Analog: 0 - 5 VDC or 0 - 10 VDC
  • Channels
    2
  • Temperature Readout Units
    °C
  • Communication
    DeviceNet

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