Water Delivery System, Ammonia Water
Model: DI-NH3
Water Delivery System, Ammonia Water
Water Delivery System, Ammonia Water
Model: DI-NH3
Overview
Overview
MKS' DI-NH3 is a compact, stand-alone system providing dissolved ammonia water. With Semiconductor 3D IC architectures using new materials like Cu-Co and Si-SiGe, the ability to wet clean with precise alkaline chemistries is growing in frequency and importance. The DI-NH3 delivers dissolved ammonia, providing optimal cleaning capability in an alkaline chemistry, minimizing material loss and contamination and inhibiting Electrostatic Discharge (ESD). Using closed-loop control, conductivity and pressure are kept stable under changing flow conditions. The dissolved ammonia concentration is monitored and adjusted, delivering the specific NH4OH concentration needed.
Technical Specs
-
Outlet PressureConfigurable 1.0-3.0 barg (3.7barg with outlet pump)
-
Plumbing MaterialsLiquid Wetted Surfaces: PFA, PTFE, quartz glass
Gas Wetted Surfaces: 316L stainless steel, PFA, PTFE -
CommunicationBinary in/out, RS232/RS485, analog 4-20 mA in/out, USB
-
DimensionsCoated steel, approximately 1810 mm high, 800 mm wide, 610 mm deep (71.2 x 31.5 x 24.1 in.)
Overall height: approx. 2000 mm (79 in.)
-
Weight290-300 kg, depending on configuration
-
ComplianceCE, SEMI S2, SEMI F47, NRTL
Resources & Downloads
Drawings & CADs
- DI-NH3 Dimensional Drawing (1 MB, PDF)
Literature
- DI-NH3 Dissolved Ammonia Delivery System (467 kB, PDF)
Ultra-High Velocity