Ozone Delivery System, 50 slm per channel, Fully Integrated Modular

Technical Specs

  • Type
    Ozone Gas Delivery System
  • Ozone Output
    >400g/Nm3
  • Flow Rate
    2.5 gpm per generator
  • Feed Gas
    Oxygen, Nitrogen
  • Feed Gas Supply Pressure
    70 ±2 psig (483 ±13.5 kPa, 4.92 ±0.14 kg/cm2) nominal, 80 ±2 psig (551 ±13.5 kPa, 5.62 ±0.14 kg/cm2) maximum N2 pressure 10 psi higher than O2 pressure
  • Feed Gas Purity
    99.9995% minimum
  • Operating Temperature
    5 - 40°C (41 - 104°F)
  • Cooling Water Temperature Required
    5 - 17°C
  • Cooling Water Filtration Required
    100 microns
  • Cooling Water Quality Required
    1 - 3 MΩcm DI
  • Cooling Water Minimum Flow Required
    2.5 gpm per generator
  • Cooling Water Connections Required
    1 in. compression (Swagelok®)
  • Cooling Water Heat Load Required
    5 kw per generator
  • Voltage Requirements
    208 volts AC (±10%), three phase
  • Current Requirements
    65 Amps max (fully populated system)
  • Frequency
    50/60 Hz
  • Exhaust Flow Rate
    Two-generator system requires 125 CFM (3.5m3/min), Four-generator system requires 250 CFM (7m3/min), Static Pressure 125CFM (3.5m3/min) requires 0.1 in. H20 minimum (25 Pa), measured 3 ft inside the customer provided exhaust air duct, 250 CFM (7m3/min)
  • Exhaust Type
    SEMI Category 4 (accidental or emergency release of hazardous gas or vapor)
  • Exhaust Static Pressure
    0.07 in. H20 minimum (17.4 Pa), measured at duct entrance to cabinet
  • Control Air Pressure
    70 - 100 psig (483 - 689 kPa)
  • Control Air Type
    CDA or dry nitrogen, 40µ filtered
  • Control Air Fitting
    0.25 in. compression (Swagelok®)
  • Exhaust Connection
    6 in. diameter duct opening standard
  • Dimensions
    26 x 82 x 38 in. (661 x 2083 x 965 mm) (width x height x depth)
  • Relative Humidity
    30 - 90% (non - condensing)
  • Weight
    705 lbs (320 Kg) for system with one generator 1 channel and BMT safety monitor, 1015 lbs (461 Kg) for system with four generator 1 channel and BMT safety monitor, 1045 lbs (480 Kg) for system with two generator 1 channel and BMT safety monitor and chiller
  • Compliance
    ETL 9700614, SEMI S2-0715
  • Altitude
    Up to 1000 m (3280 ft) above mean sea level

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