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Ozone Delivery System, 50 slm per channel, Fully Integrated Modular

Model: AX8580

Ozone Delivery System, 50 slm per channel, Fully Integrated Modular

AX8580 Fully Integrated Modular Ozone Delivery System
AX8580 Fully Integrated Modular Ozone Delivery System
AX8580 Fully Integrated Modular Ozone Delivery System

Ozone Delivery System, 50 slm per channel, Fully Integrated Modular

Model: AX8580

Technical Specs

  • Type
    Ozone Gas Delivery System
  • Ozone Output
    >400g/Nm3
  • Flow Rate
    2.5 gpm per generator
  • Feed Gas
    Oxygen, Nitrogen
  • Feed Gas Supply Pressure
    70 ±2 psig (483 ±13.5 kPa, 4.92 ±0.14 kg/cm2) nominal, 80 ±2 psig (551 ±13.5 kPa, 5.62 ±0.14 kg/cm2) maximum N2 pressure 10 psi higher than O2 pressure
  • Feed Gas Purity
    99.9995% minimum
  • Operating Temperature
    5 - 40°C (41 - 104°F)
  • Cooling Water Temperature Required
    5 - 17°C
  • Cooling Water Filtration Required
    100 microns
  • Cooling Water Quality Required
    1 - 3 MΩcm DI
  • Cooling Water Minimum Flow Required
    2.5 gpm per generator
  • Cooling Water Connections Required
    1 in. compression (Swagelok®)
  • Cooling Water Heat Load Required
    5 kw per generator
  • Voltage Requirements
    208 volts AC (±10%), three phase
  • Current Requirements
    65 Amps max (fully populated system)
  • Frequency
    50/60 Hz
  • Exhaust Flow Rate
    Two-generator system requires 125 CFM (3.5m3/min), Four-generator system requires 250 CFM (7m3/min), Static Pressure 125CFM (3.5m3/min) requires 0.1 in. H20 minimum (25 Pa), measured 3 ft inside the customer provided exhaust air duct, 250 CFM (7m3/min)
  • Exhaust Type
    SEMI Category 4 (accidental or emergency release of hazardous gas or vapor)
  • Exhaust Static Pressure
    0.07 in. H20 minimum (17.4 Pa), measured at duct entrance to cabinet
  • Control Air Pressure
    70 - 100 psig (483 - 689 kPa)
  • Control Air Type
    CDA or dry nitrogen, 40µ filtered
  • Control Air Fitting
    0.25 in. compression (Swagelok®)
  • Exhaust Connection
    6 in. diameter duct opening standard
  • Dimensions
    26 x 82 x 38 in. (661 x 2083 x 965 mm) (width x height x depth)
  • Relative Humidity
    30 - 90% (non - condensing)
  • Weight
    705 lbs (320 Kg) for system with one generator 1 channel and BMT safety monitor, 1015 lbs (461 Kg) for system with four generator 1 channel and BMT safety monitor, 1045 lbs (480 Kg) for system with two generator 1 channel and BMT safety monitor and chiller
  • Compliance
    ETL 9700614, SEMI S2-0715
  • Altitude
    Up to 1000 m (3280 ft) above mean sea level

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