The AX8575 stand-alone ozone gas delivery system is designed to provide high flow, high concentration, ultra clean ozone generation and delivery. This unit has the highest flexibility to meet the ever changing needs of the semiconductor industry. The AX8575 is a fully integrated, high output ozone gas delivery system that can be configured as a multi-channel system delivering ozone for up to 4 channels supporting multiple chambers or multiple tools. The AX8575 is available with an in-rack chiller option for high concentrations. Flow rates of up to 40 slm and concentrations up to 350g/Nm3 can be achieved depending on the configuration of the system.
12 - 21°C with chiller, 5 - 17°C without chiller
Cooling Water Filtration Required
100 micron Filtration PWC (with chiller)
Cooling Water Quality Required
1 - 3 MOhm DI, Note: Max DI water/Glycol blend: 70/30
Cooling Water Minimum Flow Required
10 gpm nominal (water modulating valve range: 2 - 10 gpm) with chiller, 2.5 gpm per Generator (configuration dependant) without chiller
Cooling Water Connections Required
1 in. compression (Swagelok®)
Cooling Water Heat Load Required
10 kw (based on two generator configuration) with chiller, 5 kw per generator without chiller
Voltage Requirements
208 volts AC (±10%), three phase
Current Requirements
31 Amps RMS, 50 Amps service (depending on configuration) minimum of 10,000 A.I.C, 60 Amps service with chiller
Frequency
50/60 Hz
Exhaust Flow Rate
150 cfm (70.8 l/s)
Exhaust Type
SEMI Category 4 (accidental or emergency release of hazardous gas or vapor)
Exhaust Static Pressure
0.10 in. (2.54 mm) H2O minimum, measured at the bottom of the duct flange adapter on cabinet
Control Air Pressure
70 - 100 psig
Control Air Type
CDA or dry nitrogen, 40µm filtered
Control Air Fitting
1/4 in. compression (Swagelok®)
Exhaust Connection
6 in. diameter duct opening or 4 in. diameter duct opening
Dimensions
24 x 75 x 36 in. (610 mm x 1575 mm x 914 mm) (width x height x depth)
Relative Humidity
30 - 90% (non - condensing)
Weight
600 lbs.(272 kg) for system with one generator, 880 lbs.(400 kg) for system with four generators, 1100 lbs. (499 kg) for system with two generators and internal chiller
12 - 21°C with chiller, 5 - 17°C without chiller
Cooling Water Filtration Required
100 micron Filtration PWC (with chiller)
Cooling Water Quality Required
1 - 3 MOhm DI, Note: Max DI water/Glycol blend: 70/30
Cooling Water Minimum Flow Required
10 gpm nominal (water modulating valve range: 2 - 10 gpm) with chiller, 2.5 gpm per Generator (configuration dependant) without chiller
Cooling Water Connections Required
1 in. compression (Swagelok®)
Cooling Water Heat Load Required
10 kw (based on two generator configuration) with chiller, 5 kw per generator without chiller
Voltage Requirements
208 volts AC (±10%), three phase
Current Requirements
31 Amps RMS, 50 Amps service (depending on configuration) minimum of 10,000 A.I.C, 60 Amps service with chiller
Frequency
50/60 Hz
Exhaust Flow Rate
150 cfm (70.8 l/s)
Exhaust Type
SEMI Category 4 (accidental or emergency release of hazardous gas or vapor)
Exhaust Static Pressure
0.10 in. (2.54 mm) H2O minimum, measured at the bottom of the duct flange adapter on cabinet
Control Air Pressure
70 - 100 psig
Control Air Type
CDA or dry nitrogen, 40µm filtered
Control Air Fitting
1/4 in. compression (Swagelok®)
Exhaust Connection
6 in. diameter duct opening or 4 in. diameter duct opening
Dimensions
24 x 75 x 36 in. (610 mm x 1575 mm x 914 mm) (width x height x depth)
Relative Humidity
30 - 90% (non - condensing)
Weight
600 lbs.(272 kg) for system with one generator, 880 lbs.(400 kg) for system with four generators, 1100 lbs. (499 kg) for system with two generators and internal chiller
Additional CAD file downloads are not available for this product.
AX8575 - Drawings
Additional drawings are not available for this product.
AX8575
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