Ozone Delivery Subsystem, 40 slm Ozone Delivery Subsystem, In-rack Chiller

Technical Specs

  • Type
    Ozone Gas Delivery System
  • Ozone Output
    up to 350g/Nm3
  • Flow Rate
    40 slm (max.)
  • Feed Gas
    Oxygen, Nitrogen (20 - 100 ppm of total flow)
  • Feed Gas Supply Pressure
    50 psig (3.5 kg/cm2) nominal, 60 psig (4.2 kg/cm2) maximum, N2 pressure 10 psi higher than O2 pressure
  • Feed Gas Purity
    99.9995% minimum
  • Operating Temperature
    41 - 104°F (5 - 40°C)
  • Cooling Water Temperature Required
    12 - 21°C with chiller, 5 - 17°C without chiller
  • Cooling Water Filtration Required
    100 micron Filtration PWC (with chiller)
  • Cooling Water Quality Required
    1 - 3 MOhm DI, Note: Max DI water/Glycol blend: 70/30
  • Cooling Water Minimum Flow Required
    10 gpm nominal (water modulating valve range: 2 - 10 gpm) with chiller, 2.5 gpm per Generator (configuration dependant) without chiller
  • Cooling Water Connections Required
    1 in. compression (Swagelok®)
  • Cooling Water Heat Load Required
    10 kw (based on two generator configuration) with chiller, 5 kw per generator without chiller
  • Voltage Requirements
    208 volts AC (±10%), three phase
  • Current Requirements
    31 amps RMS, 50 amps service (depending on configuration) minimum of 10,000 A.I.C, 60 amps service with chiller
  • Frequency
    50/60 Hz
  • Exhaust Flow Rate
    150 cfm (70.8 l/s)
  • Exhaust Type
    SEMI Category 4 (accidental or emergency release of hazardous gas or vapor)
  • Exhaust Static Pressure
    0.10 in. (2.54 mm) H2O minimum, measured at the bottom of the duct flange adapter on cabinet
  • Control Air Pressure
    70 - 100 psig
  • Control Air Type
    CDA or dry nitrogen, 40µm filtered
  • Control Air Fitting
    1/4 in. compression (Swagelok®)
  • Exhaust Connection
    6 in. diameter duct opening or 4 in. diameter duct opening
  • Dimensions
    24 x 75 x 36 in. (610 mm x 1575 mm x 914 mm) (width x height x depth)
  • Relative Humidity
    30 - 90% (non - condensing)
  • Weight
    600 lbs.(272 kg) for system with one generator, 880 lbs.(400 kg) for system with four generators, 1100 lbs. (499 kg) for system with two generators and internal chiller
  • Compliance
    CE, S2 - 0302, F47
  • Altitude
    Up to 3280 feet (1000 m) above mean sea level

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