The AX8561 O3MEGA Ozone Delivery Subsystem is a compact, integrated ozone solution that incorporates field-proven, high concentration, ultraclean ozone generation technology, an integrated ozone concentration monitor, flow control for both O2 and dopant gas species, as well as an electronic pressure controller. Designed for maximum flexibility, O3MEGA subsystems are the smallest, most complete ozone delivery system available. Ozone is an environmentally friendly alternative to many chemical processes. It has a high redox potential and can be generated at the point-of-use and is easily converted back to oxygen. Typical applications in semiconductor processing include atomic layer deposition (ALD) TEOS/Ozone chemical vapor deposition (CVD), Ta2O5 CVD, photoresist strip, wafer cleaning, contaminant removal, surface conditioning, and oxide growth.