Ozone Delivery Subsystem, 0.5 - 5 slm, 4-channel, Standalone

Technical Specs

  • Type
    Ozone Gas Delivery System
  • Ozone Output
    26 - 180 g/hr/channel (configuration dependent)@ 25 psi ozone delivery pressure and 17°C cooling water
  • Flow Rate
    0.5 - 5 slm/channel
  • Feed Gas
    Oxygen, Nitrogen (20 - 100 ppm of total flow), Carbon Dioxide (1000 - 2000 ppm of total flow)
  • Feed Gas Supply Pressure
    60 psig (4.2 kg/cm2) nominal, 75 psig (5.3 kg/cm2) maximum, N2/CO2 pressure 10 psi higher than O2 pressure
  • Feed Gas Purity
    99.9995% minimum
  • Operating Temperature
    41 - 104°F (5 - 40°C)
  • Cooling Water Temperature Required
    63 - 73°F (17 - 23°C)
  • Cooling Water Filtration Required
    20µm
  • Cooling Water Quality Required
    Demineralized
  • Cooling Water Minimum Flow Required
    1.0 gpm (2.3 - 3.8 slm) minimum to 1.6 gpm max. per channel (depending on configuration)
  • Cooling Water Connections Required
    1/2 in. compression (Swagelok®)
  • Cooling Water Flow Control/Indication Required
    Variable - area flow meter with valve
  • Cooling Water Pressure Indication Required
    Inlet pressure gauge
  • Voltage Requirements
    208 volts AC (±10%), three phase
  • Current Requirements
    15 amps RMS, 30 amps service, 31 amps RMS, 50 amps service (depending on configuration) minimum of 10,000 A.I.C.
  • Frequency
    50/60 Hz
  • Pressure Indication
    Inlet pressure gauge for each gas
  • Exhaust Flow Rate
    150 cfm (70.8 l/s)
  • Exhaust Type
    SEMI Category 4 (accidental or emergency release of hazardous gas or vapor)
  • Exhaust Static Pressure
    0.10 in. (2.54 mm) H2O minimum measured at the bottom of the duct flange adapter on cabinet
  • Control Air Pressure
    70 - 100 psig
  • Control Air Type
    CDA or dry nitrogen, 40µm filtered
  • Control Air Fitting
    1/4 in. compression (Swagelok®)
  • Exhaust Connection
    6 - in. diameter duct opening
  • Dimensions
    24 x 75 x 36 in. (610 x 1575 x 914 mm) (width x height x depth)
  • Relative Humidity
    30 - 90% (non - condensing)
  • Weight
    600 lbs.(272 kg) for system with one generator,880 lbs.(400 kg) for system with four generators
  • Compliance
    CE, S2 - 0302, F47
  • Altitude
    Up to 3280 ft. (1000 m) above mean sea level

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