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Remote Plasma Source, 6 slm, O2 Flow, , R*evolution III

Technical Specs

  • Type
    Remote Plasma Source
  • Ignition Gas Supply
    100% O2 or Ar, or 90% O2/10% N2
  • Process Gas Supply
    Up to 6.0 slm of 100% O2, or 90% O2/10% N2
  • Operating Pressure
    0.5 - 2.0 Torr @ 1.0 - 6.0 slm
  • Output
    Up to 6 slm radicals
  • Inputs
    Plasma On/Off, Power Set
  • Outputs
    Ready, AC line, Plasma On, Power Monitor
  • Duty Cycle
    100%
  • Interlocks
    Internal thermal switch and internal water flow switch to protect against insufficient cooling
  • Wetted Materials
    6061-T6 Aluminum, Kalrez, SiO2, 316L SS, Nickel, Fluorosilicone
  • Control Interface
    Discrete I/O, 9 and 25 pin D connectors, RS-232, DeviceNet and Ethernet (MKS TOOLweb-enabled)
  • Power Requirements
    180 to 228 VAC, 50/60 Hz, 30A, 3 phase
  • Cooling Water
    1.75 gpm, <30°C
  • Operating Temperature
    40°C max.
  • Dimensions
    15.7 x 13.7 x 12.14 in. (399 x 348 x 308 mm nominal)
  • Weight
    85 lb. (38.6 Kg)
  • Compliance
    Semi S2-0703 (includes S8, S10), CE EMC (EN55011, EN61326), NRTL (UL 61010A-1, CSA 22.2 No. 1010.1), Semi F47-0200 Voltage Sag Immunity

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