Vacuum Transducer, Cold Cathode-MicroPirani, 2.75 in. CF, RS232

Technical Specs

  • Absolute Measurement Range
    1.0 x 10-8 to 760 Torr
  • Digital Communication
    RS232
  • Type
    Vacuum Transducer
  • Sensor
    Cold Cathode and MicroPiraniâ„¢ (MEMS Thermal Conductivity)
  • Display
    No
  • Seal Material
    Viton
  • Enclosure
    Standard
  • Electrical Connector
    15-pin, High Density, D-sub male
  • Interface
    RS232/analog
  • Relays
    0
  • Fitting Type
    2.75 in. CF
  • Installation Orientation
    Any
  • Set Point Range
    1 x 10-8 Torr to Atmosphere Absolute
  • Calibration Gas
    Nitrogen
  • Operating Temperature
    0 - 40°C (32 - 104°F)
  • Maximum Bakeout Temperature
    85°C (185°F)
  • Digital Controls
    Pressure units, baud rate, address, factory default, user tag, RS485 test, gas correction, set point functions: value, hysteresis, direction, HV enable, protect, control set point, gas type
  • Digital Status
    Pressure reading and units, set point, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions
  • Analog Output
    0.5 VDC per Decade
  • Power Requirements
    9 - 30 VDC, 2 Watts
  • Accuracy
    5 x 10-8 Torr to 10-3 ±30% of Reading, 10-3 to 100 ±5% of Reading (Typical)Combined Absolute
  • Repeatability
    5 x 10-8 Torr to 10-3 ±30% of Reading, 10-3 to 100 ±2% of Reading (Typical) Combined Absolute
  • Overpressure Limit
    1500 Torr
  • Internal Volume
    21 cm3
  • Exposed Materials
    304 and 403 stainless steel, silicon, SiO2, SiN4, gold, Viton, epoxy resin, ceramic
  • Electronic Casing and Flange
    304 stainless steel
  • Compliance
    CE

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