Vacuum Transducer, MicroPirani-Absolute Piezo, 8 VCR, RS232

Technical Specs

  • Absolute Measurement Range
    1.0 x 10-5 to 1500 Torr
  • Digital Communication
    RS232
  • Type
    Vacuum Transducer
  • Sensor
    MicroPirani (MEMS Thermal Conductivity), Piezo absolute (MEMS diaphragm)
  • Display
    No
  • Seal Material
    Viton
  • Enclosure
    Standard
  • Electrical Connector
    15-pin, High Density, D-sub male
  • Interface
    RS232/analog
  • Relays
    3
  • Fitting Type
    8 VCR female
  • Installation Orientation
    Any
  • Set Point Range
    5.0 x 10-4 - 1500 Torr, Absolute
  • Calibration Gas
    Air, Argon, Helium, Nitrogen, H2, H2O vapor, CO2, Xenon, Neon, Gas independent above 11 Torr
  • Operating Temperature
    0 - 40°C (32 - 104°F)
  • Maximum Bakeout Temperature
    85°C (185°F)
  • Digital Controls
    Zero adjust, span adjust, analog output, pressure units, baud rate, address, factory default, set point functions: value, hysteresis, direction, enable, transducer status, switch, LED test
  • Digital Status
    Pressure reading, units, set point, operating time, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions, part number, manufacturer
  • Analog Output
    1-9.2 VDC, (1 VDC per Decade)
  • Analog Output Resolution
    16 bit
  • Relay Contact Rating
    1 Amp @ 30 VAC/DC, resistive
  • Relay Response
    100 msec maximum
  • Power Requirements
    9 - 30 VDC, <1.2 Watts maximum
  • Accuracy
    5 x 10-4 to 1 x 10-3 Torr ±10% of Reading, 1 x 10-3 to 11 Torr ±5% of Reading, 11 - 1000 Torr ±0.75% of Reading
  • Repeatability
    5 x 10-4 to 10-3 Torr ±8% of Reading, 10-3 Torr to 11 Torr ±2% of Reading, 11 - 1000 Torr ±0.2% of Reading
  • Overpressure Limit
    2250 Torr (absolute)
  • Exposed Materials
    Silicon, SiO2, Si3N4, gold, low outgassing epoxy resin, 304 stainless steel, Viton
  • Electronic Casing and Flange
    304 stainless steel
  • Compliance
    CE
  • Digital Baud Rates
    4800 - 230400 Baud

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