Absolute Pressure Controller, 100 Torr, 5000 sccm, 4 VCR-M, Viton Seal, Viton Valve Plug

Technical Specs

  • Type
    Absolute Pressure Controller
  • Pressure Range
    100 Torr
  • Fitting Type
    4 VCR male
  • Valve Position
    Normally closed
  • Valve Seat
    Viton
  • Valve Orifice
    No. 3 (5000 sccm)
  • Flow Rate
    5000 sccm
  • Trip Points
    Two open-collector transistors, Rated 250 mA @ 30 VDC, Adjustable 1 - 100% of Full Scale
  • Plug Material
    Viton
  • Pressure Resolution
    <100 msec
  • Pressure Control Accuracy
    ±0.2% of Full Scale
  • Transducer Over Pressure Limit
    45 psia or 2x Full Scale, whichever is greater
  • Maximum Differential Pressure
    150 psi for 50 - 10,000 sccm orifices, 30 psi for 20,000 and 50,000 sccm orifices (consistent with transducer overpressure limit)
  • Control Mode
    Downstream
  • Pressure Measurement Accuracy
    ±0.5% of Reading (includes linearity, hysteresis, and repeatability)
  • Zero Temperature Coefficient
    ±0.02% of Full Scale/°C
  • Span Temperature Coefficient
    ±0.04% of Reading/°C
  • Control Range
    >2 to 100% of Full Scale
  • Typical Response Time
    <1.0 sec (excluding system time constant)
  • Operating Temperature
    0 - 50°C (32 - 122°F)
  • Storage Temperature
    -20 - 80°C (-4 - 176°F)
  • External Leak Integrity
    <10-9 scc/sec He
  • Leak Integrity Through Closed Valve
    Elastomer valve: <10-4 scc/sec He, Metal valve: <1% of Full Scale (N2 @ 1 atm. δP), Kel-F valve: <0.5% of Full Scale (N2 @ 1 atm. δP)
  • Wetted Materials
    316L S.S., 316L/VAR S.S., Inconel, Nickel, plus valve seal
  • Power Required
    ±15 VDC ±5%, 200 mA max.
  • Connector-Interface
    15-pin male type D
  • Indicators
    Green LED on when actuated
  • RFI Sensitivity
    SAMA 33.1, 1-abc: <0.2% of Full Scale
  • Input-Output Signals
    0-5 VDC standard, 0-10 VDC optional
  • Hysteresis
    3% of Full Scale
  • Cable Length
    100 ft. (30 m) max.
  • Weight
    2.54 lbs. (1.15 kg)
  • Dimensions
    1.5 x 4.88 x 5.5 in. (38.1 x 124 x 140 mm)
  • Compliance
    CE

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