Vacuum Gauge, Micro-Ion Plus, 2.75 in. OD CF, RS485

Technical Specs

  • Type
    Vacuum Gauge Module
  • Display
    No
  • Interface
    RS485
  • Digital Communication
    RS485
  • Relays
    0
  • Fitting Type
    2.75 in. CF
  • Absolute Measurement Range
    1.0 x 10-9 to 760 Torr
  • Operating Temperature
    10 - 40°C (50 - 104°F), non-condensing
  • Maximum Bakeout Temperature
    105°C (221°F) with electronics removed
  • Storage Temperature
    -40 - 70°C (-40 - 158°F)
  • Relay Contact Rating
    Maximum 1 A at 30 VDC, Resistive load, Minimum 5 mA at 5 VDC, Resistive load
  • Power Requirements
    24 VDC +10% to -15%, 1 Amps, 22 Watts
  • Accuracy
    1 x 10-8 to 100 mTorr ±15% of Reading, 100 mTorr to 150 Torr ±10% of Reading, 1.33 x 10-8 to 0.133 mbar ±15% of Reading, 0.133 to 200 mbar ±10% of Reading, 1.33 x 10-6 to 13.3 Pa ±15% of Reading, 13.3 to 2.00 x 104 Pa ±10% of Reading (for Air or N2 Absolute Pressure)
  • Repeatability
    1 x 10-8 to 100 mTorr: ±5% of Reading, 100 mTorr to 150 Torr: ±2.5% of Reading, 1.33 x 10-8 to 0.133 mbar: ±5% of Reading, 0.133 to 200 mbar: ±2.5% of Reading, 1.33 x 10-6 to 13.3 Pa: ±5% of Reading, 13.3 to 2.00 x 104 Pa: ±2.5% of Reading (for Air or N2 Absolute Pressure)
  • Internal Volume
    10.8 cm3 (0.65 in3)
  • Exposed Materials
    304 stainless steel, tantalum, tungsten, yttria-coated iridium, alumina, CuAg eutectic, Kovar, gold or nickel plated Kovar, borosilicate glass
  • Electronic Casing and Flange
    Aluminum Extrusion with Powder-coat
  • Compliance
    CE
  • Filament
    Yttria-coated Iridium
  • Response Time
    <25 mseconds
  • Connectors
    15-pin subminiature-D male
  • Units
    Torr
  • RS485 Communications
    ASCII: No parity, one stop bit
  • RS485 Address
    0-63, selected by using address switch and RS485 command
  • X-ray Limit
    <3 x 10-10 Torr, <4 x 10-10 mbar, <4 x 10-8 Pascal
  • Emission Current
    Autoranging
  • Degas
    Electron bombardment, 3 Watts for 1 minute/filament
  • Automatic Ionization Gauge On Setting
    2 x 10-2 Torr, 2.66 x 10-2 mbar, 2.66 Pa, with decreasing pressure
  • Automatic Switch to High Emission Setting
    5 x 10-6 Torr, 6.66 x 10-6 mbar, 6.66 x 10-4 Pa, with decreasing pressure
  • Automatic Ionization Gauge Off Setting
    3 x 10-2 Torr, 3.99 x 10-2 mbar, 3.99 Pa, with increasing pressure
  • Automatic Switch to Low Emission Setting
    1 x 10-5 Torr, 1.33 x 10-5 mbar, 1.33 x 10-3 Pa, with increasing pressure
  • Heat-loss Sensor Wires
    Gold-plated tungsten
  • Maximum Inrush Current
    2 Amps, 48 Watts, for 0.5 seconds

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