Vacuum Gauge, Micro-Ion ATM, NW25-KF, EtherCAT, 2 Relays
Model: 390710-2-YE-T
Vacuum Gauge, Micro-Ion ATM, NW25-KF, EtherCAT, 2 Relays
Vacuum Gauge, Micro-Ion ATM, NW25-KF, EtherCAT, 2 Relays
Model: 390710-2-YE-T
Overview
Overview
The 390710-2-YE-T Micro-Ion® ATM Vacuum Gauge Module features 1x10-9 Torr - Atmosphere pressure measurement, a NW25-KF flange fitting, and EtherCAT communications. Two set point control relays are included to simplify process control functions. It combines proven Micro-Ion® ionization vacuum gauge technology with a miniature Conductron heat loss sensor and two Piezo resistive sensors to provide accurate, continuous pressure measurement from high vacuum to atmosphere. Using its diaphragm sensors, the 390 Micro-Ion® ATM Micro-Ion®/Conductron/Piezo Vacuum Gauge Module is capable of providing accurate absolute pressure up to Atmosphere along with precise indication of vacuum chamber differential pressure from ambient. The unique vacuum sensor design eliminates thermal effects that can influence the performance of the heat loss sensor at higher pressures. The small 390 Micro-Ion® ATM combines all four sensors and control electronics in a compact modular design, reducing the number of gauges required on a chamber and minimizing the required space.
Technical Specs
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Absolute Measurement Range1.0 x 10-9 to 760 Torr
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Differential Measurement Range-750 to +250 Torr
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Digital CommunicationEtherCAT
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TypeVacuum Gauge Module
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DisplayNo
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InterfaceEtherCAT
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Relays2
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Fitting TypeISO-KF NW25
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Operating Temperature10 - 40°C (50° to 104°F), non-condensing
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Maximum Bakeout Temperature105°C (221°F) with electronics removed
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Storage Temperature-40 - 70°C (-40 - 158°F)
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Relay Contact RatingMaximum: 1 A at 30 VDC, resistive load, Minimum: 5 mA at 5 VDC, resistive load
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Power Requirements24 VDC +10% to -15%, 1 Amp, 22 Watts nominal
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AccuracyAbsolute: 1x10-8 to 100 mTorr: ±15% of Reading, 100 mTorr to 150 Torr: ±10% of Reading, 150 to 1000 Torr: ±2.5% of Reading, 1.33 x 10-8 to 0.133 mbar: ±15% of Reading, 0.133 to 200 mbar: ±10% of Reading, 200 to 1,333 mbar: ±2.5% of Reading, 1.33 x 10-6 to 13.3 Pa: ±15% of Reading, 13.3 to 2.00 x 104 Pa: ±10% of Reading, 2.00 x 104 to 1.33 x 105 Pa: ±2.5% of Reading. Differential: ±(2.5 Torr + 2.5% of Reading), ±(3.3 mbar + 2.5% of Reading), ±(0.33 kPa + 2.5% of Reading)
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Repeatability1x10-8 to 100 mTorr: ±5% of Reading, 100 mTorr to 150 Torr: ±2.5% of Reading, 150 to 1000 Torr: ±1.0% of Reading, 1.33 x 10-8 to 0.133 mbar: ±5% of Reading, 0.133 to 200 mbar: ±2.5% of Reading, 200 to 1,333 mbar: ±1.0% of Reading, 1.33 x 10-6 to 13.3 Pa: ±5% of Reading, 13.3 to 2.00 x 104 Pa: ±2.5% of Reading, 2.00 x 104 to 1.33 x 105 Pa: ±1.0% of Reading (for Air or N2 Absolute Pressure)
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Internal Volume10.8 cm3 (0.65 in.3)
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Exposed Materials304 stainless steel, tantalum, tungsten, yttria-coated iridium, alumina, CuAg eutectic, Kovar, gold or nickel plated Kovar, borosilicate glass
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Electronic Casing and FlangeAluminum Extrusion with Powder-coat
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ComplianceCE
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FilamentYttria-coated Iridium
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Response Time<25 mseconds
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Connectors15-pin D-sub and two RJ45
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UnitsTorr
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X-ray Limit<3 x 10-10 Torr, <4 x 10-10 mbar, <4 x 10-8 Pascal
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Emission CurrentAutoranging
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DegasElectron bombardment, 3 Watts for 1 minute/filament
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Automatic Ionization Gauge On Setting2 x 10-2 Torr, 2.66 x 10-2 mbar, 2.66 Pa, with decreasing pressure
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Automatic Switch to High Emission Setting5 x 10-6 Torr, 6.66 x 10-6 mbar, 6.66 x 10-4 Pa, with decreasing pressure
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Automatic Ionization Gauge Off Setting3 x 10-2 Torr, 3.99 x 10-2 mbar, 3.99 Pa, with increasing pressure
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Automatic Switch to Low Emission Setting1 x 10-5 Torr, 1.33 x 10-5 mbar, 1.33 x 10-3 Pa, with increasing pressure
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Heat-loss Sensor WiresGold-plated tungsten
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LED IndicatorModule status
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Maximum Inrush Current2 Amps, 48 Watts, for 0.5 seconds
Vacuum Gauge, Micro-Ion ATM, NW25-KF, EtherCAT, 2 Relays
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