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Upstream Flow Control Valve, Metal Seated, 10-11 to 6000 Torr
Model: 245VALVE
Upstream Flow Control Valve, Metal Seated, 10-11 to 6000 Torr
Upstream Flow Control Valve, Metal Seated, 10-11 to 6000 Torr
Model: 245VALVE
Overview
Overview
The 245 Valve is a modified version of the Granville-Phillips Series 216 all-metal, bakeable control valve. The 245 Valve is capable of controlling pressure from 10-11 to 6000 Torr, with a maximum throughput up to 2500 Torr-liters/sec (200 slm): The valve can be used with many corrosive gases that preclude the use of other valves. With the valve driver assembly removed, the valve may be baked to 450°C for UHV applications. The stepper motor used to drive the Type 245 allows response to pressure or set point changes in fractions of a second, and will drive the valve from a fully closed to a fully open position in only 15 seconds. The Type 244 Controller completes the system.
Technical Specs
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Closed Conductance Leakage<10-9 scc/sec
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Maximum Throughput2500 Torr-liters/sec (20,000 sccm)
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Maximum Inlet Pressure200 psig on center port, 25 psig on other port
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Exposed Materials304 stainless steel and fine silver
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Seal Materialmetal
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Fitting Type0.25 in. (6.35 mm) Tube
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Operating Temperature0 - 50°C
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Bake Out Temperature450°C (with driver removed and bakeout clamp installed)
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ComplianceEMC Directive 2004/108/EEC when used with an overall metal braided shielded cable, properly grounded at both ends
Upstream Flow Control Valve, Metal Seated, 10-11 to 6000 Torr
Ultra-High Velocity