Upstream Flow Control Valve, Metal Seated, 10-11 to 6000 Torr

Technical Specs

  • Closed Conductance Leakage
    <10-9 scc/sec
  • Maximum Throughput
    2500 Torr-liters/sec (20,000 sccm)
  • Maximum Inlet Pressure
    200 psig on center port, 25 psig on other port
  • Exposed Materials
    304 stainless steel and fine silver
  • Seal Material
    metal
  • Fitting Type
    0.25 in. (6.35 mm) Tube
  • Operating Temperature
    0 - 50°C
  • Bake Out Temperature
    450°C (with driver removed and bakeout clamp installed)
  • Compliance
    EMC Directive 2004/108/EEC when used with an overall metal braided shielded cable, properly grounded at both ends

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