Mass Flow Meter, 10 sccm, 4 VCR Male, DB15, Metal Seal

Technical Specs

  • Type
    Mass Flow Meter
  • Calibration Gas
    N2 (or equivalent)
  • Full Scale Flow Range
    10 sccm
  • Fitting Type
    4 VCR male
  • Analog I/O Connector
    15-pin D-sub
  • Seal Material
    Metal
  • Maximum Inlet Pressure
    500 psig
  • Normal Operating Pressure Differential
    10 Torr
  • Typical Accuracy
    ±1.0% of Full Scale
  • Repeatability
    ±0.2% of Full Scale
  • Resolution
    0.1% of Full Scale
  • Zero Temperature Coefficient
    <0.05% of Full Scale/°C
  • Span Temperature Coefficient
    <0.08% of Reading/°C
  • Warm-up Time
    <2 min (to within 0.2% of Full Scale of steady state performance)
  • Operating Temperature
    0 - 50°C
  • Wetted Materials
    316L stainless steel
  • External Leak Integrity
    <1 x 10-9
  • Compliance
    CE
  • Typical Current Required at Steady State
    ±15 VDC (±5%) @ 150 mA
  • Digital I/O Level of Filtering
    ±15 VDC (±5%) @ 50 mA
  • Valve State
    <0.02% of Reading/psi

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