Mass Flow Controller, Metal-sealed, Pressure-based, 2 - 20 sccm

Technical Specs

  • Type
    Mass Flow Controller
  • Full Scale Flow Range
    2 - 20 sccm (N2 equivalent)
  • Maximum Inlet Pressure
    5 psig
  • Control Range
    5 - 100% of Full Scale (typical)
  • Typical Accuracy
    Gas/flow rate dependent (including non - linearity, hysteresis, and non - repeatability referenced to 760 mmHg and 0°C)
  • Repeatability
    ±0.2% of Full Scale
  • Resolution
    0.1% of Full Scale
  • Zero Temperature Coefficient
    <0.02% of Full Scale/°C
  • Span Temperature Coefficient
    <0.2% of Reading/°C
  • Warm-up Time
    <30 min (to within 0.2% of Full Scale of steady state performance)
  • Typical Settling Time
    <5 sec to 100% of Full Scale (per SEMI Guideline E17-91)
  • Operating Temperature
    0 - 50°C
  • Set Point Command Signal
    0 - 5 VDC from <20 kOhm
  • Flow Input Output Signal
    0 - 5 VDC into >10 kOhm
  • Wetted Materials
    316L stainless steel, nickel, Inconel®, Kel - F®, Chemraz® or Kalrez® (gas/application dependent)
  • External Leak Integrity
    <1 x 10-9
  • Leak Integrity Through Closed Valve
    1% of Full Scale (Nitrogen) at 15 psig inlet to atmosphere. To assure no flow-through, a separate positive shut-off valve is required.
  • Fitting Type
    Compatible With Swagelok® 4 VCR®
  • Compliance
    CE
  • Proof Pressure
    45 psia
  • Normal Operating Pressure Differential
    below 10 Torr
  • Analog I/O Connector
    15-pin type "D"
  • Maximum Current Required at Start-up
    ±15 VDC (±5%) @ 200 mA
  • Typical Current Required at Steady State
    ±15 VDC (±5%) @ 100 mA

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