Upstream Flow Control Valve, 500 sccm Nitrogen, 4 VCR Male Fitting

Technical Specs

  • Full Scale Flow Range
    500 sccm
  • Minimum Controllable Flow
    0.2% of Full Scale
  • Closed Conductance Leakage
    <0.1% of Full Scale
  • Exposed Materials
    316 stainless steel, Nickel, Teflon
  • Seal Material
    metal
  • Fitting Type
    4 VCR, male
  • Operating Temperature
    15 - 50°C
  • Bake Out Temperature
    150°C

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